Described here are optical sampling architectures and methods for operation thereof. An optical sampling architecture can be capable of emitting a launch sheet light beam towards a launch region and receiving a detection sheet light beam from a detection region. The launch region can have one dimension that is elongated relative to another dimension. The detection region can also have one dimension elongated relative to another dimension such that the system can selectively accept light having one or more properties (e.g., angle of incidence, beam size, beam shape, etc.). In some examples, the elongated dimension of the detection region can be greater than the elongated dimension of the launch region. In some examples, the system can include an outcoupler array and associated components for creating a launch sheet light beam having light rays with different in-plane launch positions and/or in-plane launch angles.

A method for controlling the flow of gas through a spectrometer, comprising: flowing a gas through a volume of the spectrometer, the volume being a volume through which light from a sample passes along a first path to reach a first detector and the gas being transparent to the light in a spectral region analysed by the spectrometer; transmitting light from a light source along a second path through the gas to a second detector; detecting an intensity of the light from the light source at the second detector at one or more wavelengths of the light; comparing the detected intensity of the light to a respective setpoint corresponding to a desired transmittance of the gas in the volume of the spectrometer and generating at least one error signal based on the comparison; and adjusting a flow rate of the gas through the volume of the spectrometer based on the error signal, in particular to minimise the difference between the detected intensity and setpoint.

A super resolution technique, intended mainly for fluorescence microscopy, acquires the three-dimensional position of an emitter, through a hybrid method, including a number of steps. In a first step the two-dimensional position of an emitter is acquired, using a technique, named in this application as an Abbe's loophole technique. In this technique a doughnut, or a combination of distributions, having a zero intensity at the combined center of the distributions, is projected onto the sample containing the emitter, under conditions wherein the doughnut null is moved towards the emitter to reach a position in which the emitter does not emit light. In a second step, an axial measurement is obtained using a 3D shaping method, characterized by the fact that the emitted light is shaped by an additional optical module creating a shape of the light emitted by the emitter, this shape being dependent of the axial position and means to retrieve the axial position from the shape.

In an embodiment, an apparatus (100) is described. The apparatus comprises an infrared, IR, generating system (102). The IR generating system comprises a first IR source (104) configured to produce IR radiation for forming a first IR beam (106) in a first spectral band. The IR generating system further comprises a second IR source (108) configured to produce IR radiation for forming a second IR beam (110) in a second spectral band. The apparatus further comprises a beam manipulation system (112) configured to combine a beam path of the first and second IR beams and direct the first and second IR beams along the beam path through a gas sample region (114). The apparatus further comprises an IR detection system (116) configured to detect an intensity of the first and second IR beams after passage through the gas sample region. The IR detection system is configured to produce a signal (118) from which an indication of a concentration of a target gas in the gas sample region can be derived.

An embodiment provides an inspection apparatus for a display device, including: a light supplier that supplies light to a surface of the display device; an inspection pattern portion positioned between the display device and the light supplier; a measurement portion that measures reflected light reflected from the surface of the display device; and a processor that processes data of the reflected light measured by the measurement portion, wherein the processor includes a calibration data portion including calibration data and a calibrator calibrating the data using the calibration data of the calibration data portion.

A device for optical detection of analytes in a sample includes at least two optoelectronic components. The optoelectronic components include at least one optical detector configured to receive a photon and at least one optical emitter configured to emit a photon. The at least one optical emitter includes at least three optical emitters disposed in a flat, non-linear arrangement, and the at least one optical detector includes at least three optical detectors disposed in a flat, non-linear arrangement. The at least three optical emitters and the at least three optical detectors include at least three different wavelength characteristics.

A system and method for measuring a concentration of a gas in a container having at least one flexible or variable side or wall. The system and method comprising creating a determinable optical path length through the container having a shape. Positioning a light source head and a detector head against at least one of the least one flexible or variable side or wall. Transmitting a light signal between the light source head and the detector head through the determinable optical path length. Determining the concentration of the gas in the container based on detected light and the determinable optical path length.

A super resolution technique, intended mainly for fluorescence microscopy, acquires the three-dimensional position of an emitter, through a hybrid method, including a number of steps.

In a first step the two-dimensional position of an emitter is acquired, using a technique, named in this application as an Abbe’s loophole technique., In this technique a doughnut, or a combination of distributions, having a zero intensity at the combined center of the distributions, is projected onto the sample containing the emitter, under conditions wherein the doughnut null is moved towards the emitter to reach a position in which the emitter does not emit light.

In a second step, an axial measurement is obtained using a 3D shaping method, characterized by the fact that the emitted light is shaped by an additional optical module creating a shape of the light emitted by the emitter, this shape being dependent of the axial position and means to retrieve the axial position from the shape.

Fluid processing tube for use in optical analysis comprising at least one first portion being made from a first material suitable for optical analysis and being configured to include two optical paths of different lengths, and at least one second portion connected to said first portion and being made from a second material different from said first material.

A device and method for expediting spectral measurement in metrological activities during semiconductor device fabrication through interferometric spectroscopy of white light illumination during calibration, overlay, and recipe creation.