A three-dimensional Raman image mapping measuring device for a flowable sample according to an embodiment of the present disclosure is designed to be capable of measuring a flowable sample during mapping measurement of a three-dimensional image that is a region of a confocal Raman by using a micro Raman spectrometer and a three-axis sample stage (Piezo stage). The three-dimensional Raman image mapping measuring device for a flowable sample includes at least one piezo element; an element holder equipped with the piezo element and having an opening, a sample stage for supporting the element holder equipped with the piezo element, an objective lens mounted in the opening in the element holder, a sample holder for controlling vertical movement of the flowable sample disposed under the lower portion of the sample stage, and a transparent window disposed between the sample stage and the sample holder.

A three-dimensional Raman image mapping measuring device for a flowable sample according to an embodiment of the present disclosure is designed to be capable of measuring a flowable sample during mapping measurement of a three-dimensional image that is a region of a confocal Raman by using a micro Raman spectrometer and a three-axis sample stage (Piezo stage). The three-dimensional Raman image mapping measuring device for a flowable sample includes at least one piezo element; an element holder equipped with the piezo element and having an opening, a sample stage for supporting the element holder equipped with the piezo element, an objective lens mounted in the opening in the element holder, a sample holder for controlling vertical movement of the flowable sample disposed under the lower portion of the sample stage, and a transparent window disposed between the sample stage and the sample holder.

A tomography system includes a first radiation source and a first detector that is assigned to the first radiation source. The tomography system also includes a second radiation source and a second detector that is assigned to the second radiation source. The tomography system is prepared to perform a scan. In a first plane of rotation, the first detector is guided along a first circular segment-shaped path. In a second plane of rotation, the second detector is guided in synchrony along a second circular segment-shaped path. The tomography system is configured to obtain a first data record with the first detector and a second data record with the second detector. The first plane of rotation and the second plane of rotation are arranged at a distance from one another.

A programmable digital machine vision inspection system is disclosed having a programmable automatic feeding system that supplies elements to be inspected, a programmable robot system, a programmable inspection system, a qualified product receiving container, and an unqualified product receiving container. The programmable robot system has a first vision system with an inspection area, and a robot that grips the supplied element and moves the gripped element to and from the inspection area. The programmable inspection system has a second vision system that identifies features of the elements in the inspection area, and determines whether the element is a qualified product based on the identified features. The qualified product receiving container receives identified qualified products from the robot, and the unqualified product receiving container that receives identified unqualified products from the robot.

An inspection system and method are disclosed. The inspection system may include a controller configured to be communicatively coupled to an optical sub-system. The controller may include one or more processors configured to execute program instructions to cause the one or more processors to direct a stage to perform a first scanning of a sample using a first configuration of a beam-shaping channel, where the first configuration controls an orientation of a beam profile of an illumination beam as projected onto the sample; receive first scan data associated with the first scanning; direct the stage to perform a second scanning using a second configuration of the beam-shaping channel; receive second scan data associated with the second scanning; and identify one or more defects on the sample based on scan data from at least the first and second scans. The stage may include an X-Y stage.