A controller corrects a spectrum S (λ) detected at a wavelength λ of signal light to S′ (λ) in accordance with expressions below: I(λ)=(I2−I1)×(λ−λ1)/(λ2−λ1)−I1, and S′(λ)=S(λ)−I(λ), where I1 is the intensity of infrared light detected at a wavelength λ1 of reference light and I2 is the intensity of infrared light detected at a wavelength λ2 of correction light.

The present disclosure provides Raman spectrum detection apparatus and method. The Raman spectrum detection apparatus includes: a laser configured for emitting excited light; an optics assembly configured to guide the excited light along a first light path to a sample to be detected and to collect a light signal from the sample along a second light path; and a spectrometer configured to process the light signal collected by the optics assembly so as to generate a Raman spectrum of the detected sample. The optics assembly includes a first optical element configured to move, during irradiation of the excited light onto the sample, so as to change a position of a light spot of the excited light on the sample.

The present disclosure provides Raman spectrum detection apparatus and method. The Raman spectrum detection apparatus includes: a laser configured for emitting excited light; an optics assembly configured to guide the excited light along a first light path to a sample to be detected and to collect a light signal from the sample along a second light path; and a spectrometer configured to process the light signal collected by the optics assembly so as to generate a Raman spectrum of the detected sample. The optics assembly includes a first optical element configured to move, during irradiation of the excited light onto the sample, so as to change a position of a light spot of the excited light on the sample.

A controller corrects a spectrum S () detected at a wavelength of signal light to S () in accordance with expressions below: I()=(I2I1)(1)/(21)I1, and S()=S()I(), where I1 is the intensity of infrared light detected at a wavelength 1 of reference light and I2 is the intensity of infrared light detected at a wavelength 2 of correction light.

An optical spectral sensing system that provides a full-range mid-IR FTIR based measurement for gases and vapors. The system features a small interferometer module which is integrated with a sample cell and solid-state source, that has an optimized optical path matched to the intended concentration ranges for the gas/vapor measurements. The concentration ranges targeted are from % level for high targeted gas concentrations, as provided by short-pathlength gas cells, to parts-per-million (ppm) and for certain gases high parts-per-billion (ppb) for low trace targeted gas concentrations, provided by long-pathlength gas cells. The optics and opto-mechanical components selected are able to provide a spectral range of 400 cm.sup.?1 to 5000 cm.sup.?1, with nominal spectral resolutions of 4 cm.sup.?1 to 16 cm.sup.?1, with the potential to extend the resolution from 2 cm.sup.?1 out to 32 cm.sup.?1. The electronics are optimized to support both the range and spectral resolution based the use of a universal mid-IR detector.

A side surface inspection device is provided for a cylindrical battery having a side surface defining first to fourth areas. The side surface inspection device includes a first light to emit light toward the side surface of the cylindrical battery; a plurality of mirrors having a first to fourth mirrors that each reflect light emitted from the first light to be incident on each of the first to fourth areas, respectively, of the cylindrical battery, and are configured to reflect light reflected by each of the first to fourth areas, respectively, of the cylindrical battery; and a camera to receive the light reflected by each of the plurality of mirrors and configured to form an image including images of the first to fourth areas of the cylindrical battery.

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.

Apparatus for carrying out spatially offset Raman spectroscopy (SORS) is described. The apparatus comprises a rotatable prism arranged such that a spatial offset between an entry region and a collection region at a sample is dependent upon an angle of rotation of the prism.

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.