A method for determining a measure of a gas concentration from a group of at least two non- dispersive infrared, NDIR, gas sensors (S1-SN) is described. The method comprises the steps of obtaining, at a processing unit (1), from each NDIR gas sensor (S1-SN) a measure of a gas concentration as a belief function Pi(x), which provides a probability as a function of the sensed light intensity at a specific wavelength, merging, in the processing unit, the belief functions Pi(x) to a merged belief function P(x). A computer program performing the method is also described.

Methods and systems for determining water status in plant tissue are provided. A number of systems are capable of using terahertz signals to generate signals measuring total water content in plant tissue, including plant leaves. Using these signals, methods are capable of determining water status variables, including water mass per leaf area, relative water content, and leaf water potential, which can aid in agricultural, ecological, and environmental health, such as dehydration and droughst stress of plants.

A method for determining instrument-dependent parameters of a surface plasmon resonance, SPR, biosensor system, and using those instrument-dependent parameters to measure the concentration of an analyte is provided herein. Also disclosed are methods of monitoring surface binding interactions of the analyte using the instrument-dependent parameters.

In accordance with some embodiments of the present disclosure, an inspection method of a photomask includes performing a first inspection process, unloading the photomask from the inspection system, and performing a second inspection process. In the first inspection process, a common Z calibration map of an objective lens of an optical module with respect to the photomask is generated and stored, and a first image of the photomask is captured by using an image sensor while focusing the objective lens of the optical module based on the common Z calibration map. The photomask is unloaded from the inspection system. In the second inspection process, the photomask is loaded on the inspection system and a second image of the photomask is captured by using an image sensor while focusing an objective lens of an optical module based on the common Z calibration map generated in the first inspection process.

A device may obtain a master beta coefficient of a master calibration model associated with a master instrument. The master beta coefficient may be at a grid of a target instrument. The device may perform constrained optimization of an objective function, in accordance with a set of constraints, in order to determine a pair of transferred beta coefficients. The constrained optimization may be performed based on an initial pair of transferred beta coefficients, the master beta coefficient, and spectra associated with a scouting set. The device may determine, based on the pair of transferred beta coefficients, a transferred beta coefficient. The device may determine a final transferred beta coefficient based on a set of transferred beta coefficients including the transferred beta coefficient. The final transferred beta coefficient may be associated with generating a transferred calibration model, corresponding to the master calibration model, for use by the target instrument.

An analysis method includes: obtaining n×m pieces of map data by repeating, m times, a map measurement in which n pieces of map data are obtained by scanning a specimen with a primary probe to detect electrons emitted from the specimen with an electron spectrometer, while measurement energy ranges of an analyzer are varied; and generating a spectral map in which a position on the specimen is associated with a spectrum based on the n×m pieces of map data, the measurement energy ranges of m times of the map measurement not overlapping each other.

Described are systems and techniques directed to optical inspection of moving products (wafers, substrates, films, patterns) that are being transported to or from processing chambers in device manufacturing systems. Implementations include a system that has a first source of light to direct a first light to a first location on a surface of a product. The first light generates, at the first location, a first reflected light. The system further includes a first optical sensor to generate a first data representative of a first reflected light, and a processing device, in communication with the first optical sensor to determine, using the first data, a property of the product.

As a standard solution for evaluating a scattered light measuring optical system mounted on an automated analyzer, a standard solution containing an insoluble carrier at a concentration, at which transmittance is in a range of 10% to 50%, is used, and a light quantity of a light source is adjusted such that a scattered light detector outputs a predetermined value.

Provided are a spectral calibration apparatus and a spectral calibration method capable of performing spectral calibration with high accuracy even when peaks appear simultaneously between fluorescent dyes. The spectral calibration apparatus for calculating a color conversion matrix used in color conversion processing, includes a spectral signal acquisition unit that acquires a spectral signal of fluorescence detected over time, a candidate calculation unit that calculates a candidate of the color conversion matrix for each value of a parameter, which depends on a frequency at which fluorescence peaks of fluorescent dyes appear at the same time, based on the spectral signal, and a selection unit that selects a color conversion matrix based on an evaluation value calculated for each candidate.

A calibration target for calibrating an optoelectronic device for analyzing biomolecules by detecting fluorescence signals from a sample includes a substrate and a solid fluorescent layer that is disposed on the substrate and capable of being excited by laser light. The fluorescent layer has an optically inactive matrix having embedded therein a carbon-based component that is excitable to light emission.