There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.

An on-line energy dispersive X-ray diffraction (EDXRD) analyser for mineralogical analysis of material in a process stream or a sample is disclosed. The analyser includes a collimated X-ray source to produce a diverging beam of polychromatic X-rays, and an energy resolving X-ray detector, and a substantially X-ray transparent member having the form of a solid of revolution which is circularly symmetric about a central axis between the collimated X-ray source and the energy resolving X-ray detector, an outer surface of the X-ray transparent member positionable adjacent the material to be analysed. A primary beam collimator is disposed adjacent to or within the substantially X-ray transparent member to substantially prevent direct transmission of polychromatic X-rays emitted from the source to the detector. The analyser is configured such that the diverging beam of polychromatic X-rays are directed towards the substantially X-ray transparent member, and where the energy resolving X-ray detector collects a portion of the beam of X-rays diffracted by the material and outputs a signal containing energy information of the collected, diffracted X-rays.

An on-line energy dispersive X-ray diffraction (EDXRD) analyser for mineralogical analysis of material in a process stream or a sample is disclosed. The analyser includes a collimated X-ray source to produce a diverging beam of polychromatic X-rays, and an energy resolving X-ray detector, and a substantially X-ray transparent member having the form of a solid of revolution which is circularly symmetric about a central axis between the collimated X-ray source and the energy resolving X-ray detector, an outer surface of the X-ray transparent member positionable adjacent the material to be analysed. A primary beam collimator is disposed adjacent to or within the substantially X-ray transparent member to substantially prevent direct transmission of polychromatic X-rays emitted from the source to the detector. The analyser is configured such that the diverging beam of polychromatic X-rays are directed towards the substantially X-ray transparent member, and where the energy resolving X-ray detector collects a portion of the beam of X-rays diffracted by the material and outputs a signal containing energy information of the collected, diffracted X-rays.

Provided is an X-ray analysis device and an X-ray analysis method capable of easily analyzing a valence of a target element in a sample. A controller 22 of a signal processing device of the X-ray analysis device is provided with: a storage unit 360 for storing a calibration curve generated based on a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray emitted from a metal simple substance, a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray emitted from each of two or more types of compounds each containing the metal simple substance, and a valence of the metal in each of the two or more types of compounds; a processing unit 302 configured to acquire a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray of the metal emitted from the metal contained in an unknown sample; and a calculation unit 308 configured to calculate a mean valence of the metal contained in the unknown sample by applying the obtained peak energy of Kα.sub.1 X-ray and peak energy of Kα.sub.2 X-ray to the calibration curve.

Provided is an X-ray analysis device and an X-ray analysis method capable of easily analyzing a valence of a target element in a sample. A controller 22 of a signal processing device of the X-ray analysis device is provided with: a storage unit 360 for storing a calibration curve generated based on a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray emitted from a metal simple substance, a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray emitted from each of two or more types of compounds each containing the metal simple substance, and a valence of the metal in each of the two or more types of compounds; a processing unit 302 configured to acquire a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray of the metal emitted from the metal contained in an unknown sample; and a calculation unit 308 configured to calculate a mean valence of the metal contained in the unknown sample by applying the obtained peak energy of Kα.sub.1 X-ray and peak energy of Kα.sub.2 X-ray to the calibration curve.

In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

A method and apparatus for rapid measurement and analysis of structure and composition of poly-crystal materials by X-ray diffraction and X-ray spectroscopy, which uses a two-dimensional energy dispersive area detector having an array of pixels, and a white spectrum X-ray beam source. A related data processing method includes separating X-ray diffraction and spectroscopy signals in the energy dispersive X-ray spectrum detected by each pixel of the two-dimensional energy dispersive detector; correcting the detected X-ray diffraction signals by a correction function; summing the corrected X-ray diffraction signals and X-ray spectroscopy signals, respectively, over all pixels to obtain an enhanced diffraction spectrum and an enhanced spectroscopy spectrum; using the enhanced diffraction and spectroscopy spectrum respectively to determine the structure and composition of the sample. The summing step includes using Bragg's equation to convert the intensity-energy diffraction spectrum for each pixel into an intensity-lattice spacing spectrum before summing them.

There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.

An X-ray spectroscopic analysis apparatus includes: a radiation source configured to irradiate a predetermined irradiation area in the surface of a sample with an excitation beam for generating a characteristic X-ray; an analyzing crystal provided facing the irradiation area; a slit provided between the irradiation area and the analyzing crystal, the slit being parallel to the irradiation area and a predetermined crystal plane of the analyzing crystal; and an X-ray linear sensor including linear detection elements arranged in a direction perpendicular to the slit, the detection elements each having a length in a direction parallel to the slit. By detecting characteristic X-rays from different linear portions of the irradiation area for each wavelength, it is possible to perform analysis with sensitivity higher than the sensitivity of a conventional X-ray spectroscopic analysis apparatus that irradiates a point-like irradiation area with an excitation beam.