Methods for using electron diffraction holography to investigate a sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, forming the plurality of electrons into a first electron beam and a second electron beam, and modifying the focal properties of at least one of the two beams such that the two beams have different focal planes. Once the two beams have different focal planes, the methods include focusing the first electron beam such that it has a focal plane at or near the sample, and focusing the second electron beam so that it is incident on the sample, and has a focal plane in the diffraction plane. An interference pattern of the first electron beam and the diffracted second electron beam is then detected in the diffraction plane, and then used to generate a diffraction holograph.

A radiation phase change detection method includes: arranging a two-dimensional optical image pickup element, which includes a scintillator, so that, when a period of a self-image generated through a phase grating is defined as D.sub.1, and a pixel pitch of the two-dimensional optical image pickup element is defined as D.sub.2=kD.sub.1, k falls in a range of 1/2<k≦3/2, and so that interference fringes formed by D.sub.1 and D.sub.2 depending on a relationship in arrangement of the two-dimensional optical image pickup element with respect to the self-image have a period of 2 times D.sub.2 or more and 100 times D.sub.2 or less; acquiring images of the interference fringes before and after insertion of an object; and outputting an image on a phase change of the radiation caused by at least the object.

A radiation capturing system includes the following. A radiation source, a plurality of gratings, and a radiation detector, are provided aligned in a radiation irradiating axis direction. A Talbot interferometer or a Talbot-Lau interferometer captures a moire fringe image for generating a reconstructed image. A low visibility capturing unit performs capturing of the moire fringe image with visibility of a moire fringe reduced more than in capturing of the moire fringe image for generating the reconstructed image. A generating unit generates an absorptive image based on the moire fringe image captured by the low visibility capturing unit.

A radiation capturing system includes the following. A radiation source, a plurality of gratings, and a radiation detector, are provided aligned in a radiation irradiating axis direction. A Talbot interferometer or a Talbot-Lau interferometer captures a moire fringe image for generating a reconstructed image. A low visibility capturing unit performs capturing of the moire fringe image with visibility of a moire fringe reduced more than in capturing of the moire fringe image for generating the reconstructed image. A generating unit generates an absorptive image based on the moire fringe image captured by the low visibility capturing unit.

A defect detection system comprising of an incoherent light source and a collimating light source attachment to produce spatially coherent light waves (e.g., X-rays) that are capable of deeply penetrating a device under test (e.g., a semiconductor). Changes in the spatial coherency of the light waves incident upon the device under test may be utilized to generate one or more electronic maps that indicate one or more defects within the device under test, such as, cracks, gaps, and/or air pockets within the device under test.

The present disclosure relates to fabrication and use of a phase-contrast imaging detector that includes sub-pixel resolution electrodes or photodiodes spaced to correspond to a phase-contrast interference pattern. A system using such a detector may employ fewer gratings than are typically used in a phase-contrast imaging system, with certain functionality typically provided by a detector-side analyzer grating being performed by sub-pixel resolution structures (e.g., electrodes or photodiodes) of the detector. Measurements acquired using the detector may be used to determine offset, amplitude, and phase of a phase-contrast interference pattern without multiple acquisitions at different phase steps.

Methods for using electron diffraction holography to investigate a sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, forming the plurality of electrons into a first electron beam and a second electron beam, and modifying the focal properties of at least one of the two beams such that the two beams have different focal planes. Once the two beams have different focal planes, the methods include focusing the first electron beam such that it has a focal plane at or near the sample, and focusing the second electron beam so that it is incident on the sample, and has a focal plane in the diffraction plane. An interference pattern of the first electron beam and the diffracted second electron beam is then detected in the diffraction plane, and then used to generate a diffraction holograph.

A metal grid includes: a valve metal plate which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the valve metal plate; and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. Further, a production method for a metal grid includes: a step of bending a principal surface of a valve metal plate including the principal surface; a step of forming an anodic oxide film on the principal surface of the valve metal plate; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

A metal grid includes: a member which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the member, and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. A production method for a metal grid includes: a step of forming a valve metal film on a principal surface of a member, a step of forming an anodic oxide film by performing an anodic oxidation treatment on the valve metal film while the principal surface is curved; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

The present disclosure relates to fabrication and use of a phase-contrast imaging detector that includes sub-pixel resolution electrodes or photodiodes spaced to correspond to a phase-contrast interference pattern. A system using such a detector may employ fewer gratings than are typically used in a phase-contrast imaging system, with certain functionality typically provided by a detector-side analyzer grating being performed by sub-pixel resolution structures (e.g., electrodes or photodiodes) of the detector. Measurements acquired using the detector may be used to determine offset, amplitude, and phase of a phase-contrast interference pattern without multiple acquisitions at different phase steps.