G01N2223/1006

Dual mode detection method, controller and system
11474051 · 2022-10-18 ·

The present disclosure provides a dual mode detection method, controller and system, which relates to the technical field of radiation detection. The dual mode detection method of the present disclosure includes: determining a ratio of neutron to X-ray differential cross sections of an inspected object, according to X-ray object detection data, X-ray object-free detection data, neutron object detection data, and neutron object-free detection data; determining a substance type of the inspected object according to a correspondence between the ratio of neutron to X-ray differential cross sections of the inspected object and the substance type.

X-ray photoemission system for 3-D laminography
11619596 · 2023-04-04 ·

A system is disclosed for the examination and inspection of integrated devices such as integrated circuits using 3-D laminography. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the incidence angle of the x-rays is varied to gather multiple images that allow internal three-dimensional structures of the integrated device to be determined using computed laminography. In some embodiments, the recorded images are compared with reference data to enable inspection for manufacturing quality control.

RADIOTHERAPY APPARATUS WITH ON-BOARD STEREOTACTIC IMAGING SYSTEM

The present invention provides a radiotherapy apparatus (100) to generate both photon and electron beam mounted with dual KV beam ray source used for stereotactic imaging and CBCT (Cone Beam Computed Tomography) image with a greater FOV (Field Of View). The apparatus (IOO) comprises of a ring gantry (101), which includes at least two KV sources (102a and 102b), at least two movable detector (103 and 104) and a LINAC X-ray tube (106). The two movable detectors (103, 104) include a first movable detector (104) and a second movable detector (103). The second movable detector (103) has mechanism capture a half fan mode of X-ray beam of imaging radiation with a greater FOV having 250×450 mm. The half fan mode of X ray is captured by moving the second movable detector (103) or first movable detector (104) further towards the ISO centre (105) of the ring gantry (101).

X-ray photoemission apparatus for inspection of integrated devices
11307152 · 2022-04-19 ·

An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. For some embodiments of the invention, the photoemissive structure is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In some embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

X-RAY PHOTOEMISSION SYSTEM FOR 3-D LAMINOGRAPHY
20220236199 · 2022-07-28 ·

A system is disclosed for the examination and inspection of integrated devices such as integrated circuits using 3-D laminography. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the incidence angle of the x-rays is varied to gather multiple images that allow internal three-dimensional structures of the integrated device to be determined using computed laminography. In some embodiments, the recorded images are compared with reference data to enable inspection for manufacturing quality control.

Method for determining physical properties of a sample

Disclosed is a method for determining physical properties of a test sample using a spectrometric detector with at least three channels, consisting of: performing measurements in each of the channels on the test sample, calculating variables, each formed from a combination of measurements of different channels, and applying a weighting and bias matrix to the variables, enabling the investigated physical properties of the test sample to be determined.

Quantum-limited Extreme Ultraviolet Coherent Diffraction Imaging
20220100094 · 2022-03-31 ·

Apparatus and methods for coherent diffraction imaging This is accomplished by acquiring data in a CDI setup with a CMOS or similar detector. The object is illuminated with coherent light such as EUV light which may be pulsed. This generates diffraction patterns which are collected by the detector, either in frames or continuously (by recording the scan position during collection). Pixels in the CDI data are thresholded and set to zero photons if the pixel is below the threshold level. Pixels above the threshold may be set to a value indicating one photon, or multiple thresholds may be used to set pixels values to one photon, two photons, etc. In addition, multiple threshold values may be used to detect different photon energies for illumination at multiple wavelengths.

DUAL MODE DETECTION METHOD, CONTROLLER AND SYSTEM
20210333224 · 2021-10-28 ·

The present disclosure provides a dual mode detection method, controller and system, which relates to the technical field of radiation detection. The dual mode detection method of the present disclosure includes: determining a ratio of neutron to X-ray differential cross sections of an inspected object, according to X-ray object detection data, X-ray object-free detection data, neutron object detection data, and neutron object-free detection data; determining a substance type of the inspected object according to a correspondence between the ratio of neutron to X-ray differential cross sections of the inspected object and the substance type.

Nondestructive inspection system

Disclosed is a nondestructive inspection system includes: a radiation source system generating different types of radiations and irradiating the generated different types of radiations toward an inspection object; a detector system detecting each of the radiations transmitted through the inspection object; a transfer system varying a position of the inspection object such that the radiations generated by the radiation source system are irradiated to the inspection object; and an image system generating an image regarding the inspection object on the basis of a detection result from the detector system, wherein the radiation source system comprises: an electron gun generating an electron beam; an electron accelerator accelerating the electron beam generated by the electron gun; and a target system selectively generating at least one of various types of radiations according to variables when the electron beam accelerated by the electron accelerator is irradiated thereto.

Simultaneous/single patient position X-ray and proton imaging apparatus and method of use thereof

The invention comprises an apparatus and method of use thereof for using a single patient position during, optionally simultaneous, X-ray imaging and positively charged particle imaging, where imaging a tumor of a patient using X-rays and positively charged particles comprises the steps of: (1) generating an X-ray image using the X-rays directed from an X-ray source, through the patient, and to an X-ray detector, (2) generating a positively charged particle image: (a) using the positively charged particles directed from an exit nozzle, through the patient, through the X-ray detector, and to a scintillator, the scintillator emitting photons when struck by the positively charged particles and (b) generating the positively charged particle image of the tumor using a photon detector configured to detect the emitted photons, where the X-ray detector maintains a position between said the nozzle and the scintillator during the step of generating a positively charged particle image.