An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.

Provided is a portable XRF data screening method for heavy metal contaminated soil, relating to the technical field of heavy metal contamination test. The method includes the following steps: (1) laboratory test; (2) XRF test; and (3) calculation of a recheck interval: dividing test data into four areas by a contaminant screening value X.sub.c as a horizontal line and a correlation-derived site screening value as a vertical line to calculate the recheck interval. The method is simple and efficient, and is beneficial to saving investigation costs and shortening a project cycle.

A method of analysing granular material in a slurry, the method comprising: compacting the granular material in the slurry to form one or more pucks; irradiating said pucks with X-Ray radiation and detecting X-ray energy transmitted through said one or more irradiated pucks; irradiating a reference material with X-Ray radiation, said reference material having known material characteristics and detecting X-ray energy transmitted through said reference material; comparing X-ray energy transmission through said one or more pucks with the reference material to compute, using a processing unit, one or more particle characteristics of the granular material in the one or more pucks.

Provided are a quantitative analysis method, a quantitative analysis program, and an X-ray fluorescence spectrometer. The quantitative analysis method includes: a step of acquiring a representative composition set to represent contents of analysis components; a step of acquiring a plurality of comparative compositions, in each of which the content of one of the analysis components of the representative composition is changed by a predetermined content; a detection intensity calculation step of calculating a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of the geometry effect through use of an FP method with respect to a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions; and a step of calculating a matrix correction coefficient for each of the analysis components based on the detection intensity.

A metal material other than strain-free iron powder can be used as a reference piece for X-ray measurement of residual stress. The metal material is manufactured by nanocrystallizing at least a portion of a surface of a metal material, and then removing inherent strain by annealing the metal material, thereby eliminating stress.

Provided is a portable XRF data screening method for heavy metal contaminated soil, relating to the technical field of heavy metal contamination test. The method includes the following steps: (1) laboratory test; (2) XRF test; and (3) calculation of a recheck interval: dividing test data into four areas by a contaminant screening value X.sub.c as a horizontal line and a correlation-derived site screening value as a vertical line to calculate the recheck interval. The method is simple and efficient, and is beneficial to saving investigation costs and shortening a project cycle.

A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

A method for preparing surrogate calibration standards for web gauging, is provided. The method includes providing linearizations for one or more radiometric gauges, each linearization associated with a radiometric gauge and relating the basis weight of real standards, comprising a lithium ion battery (LIB) electrode material, to transmission of the radiation through the LIB electrode material. The method also includes providing one or more surrogate standards comprising an inert material having an effective Z (Z.sub.surrogate) substantially the same as an effective Z (Z.sub.real) of the LIB material in the real standards. The method further includes assigning to each surrogate standard a surrogate basis weight based on a transmission of radiation through the surrogate standard and the linearizations

A three-dimensional (3D) x-ray tomographic imaging system includes an x-ray source fixedly attached to a first unmanned vehicle, which can be aerial or otherwise configured for locomotion, and an x-ray detector. A vehicle controller is configured to be operated by an operator, and an optical camera is mounted to the first unmanned vehicle at a fixed position relative to the x-ray source, and an optical pattern is fixed at a position relative to the x-ray detector. The x-ray source and x-ray detector are configured to be positioned on substantially opposite sides of the object, while the x-ray source is rotated radially around the object to one or more imaging positions.

The present application relates to a method for detecting the stability of an X-ray photoelectron spectrometer, comprising: obtaining a first upper limit value and a first lower limit value of a rate of oxygen and nitrogen contents of a calibrating wafer having a silicon oxynitride film formed on its surface; measuring the calibrating wafer by the X-ray photoelectron spectrometer to obtain a first test value of the rate of oxygen and nitrogen contents; and when the first test value is between the first upper limit value and the first lower limit value, considering that the photoelectron spectrometer can accurately test the nitrogen content of the monitor wafer since the value of the nitrogen content of the monitor wafer obtained by the X-ray photoelectron spectrometer is within the normal fluctuation range, and determining that the X-ray photoelectron spectrometer is stable.