Provided are a quantitative analysis method, a quantitative analysis program, and an X-ray fluorescence. The quantitative analysis method includes: a step of acquiring a representative composition set to represent contents of analysis components; a step of acquiring a plurality of comparative compositions, in each of which the content of one of the analysis components of the representative composition is changed by a predetermined content; a detection intensity calculation step of calculating a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of the geometry effect through use of an FP method with respect to a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions; and a step of calculating a matrix correction coefficient for each of the analysis components based on the detection intensity.

A glass composition includes, as main content components, by mass %, a TeO.sub.2 content percentage of 50% to 80%, a Bi.sub.2O.sub.3 content percentage of 0% to 30%, a WO.sub.3 content percentage of 0% to 30%, a ZnO content percentage of 0% to 30%, a BaO content percentage of 0% to 30%, a GeO.sub.2 content percentage of 0% to 30%, and a Ga.sub.2O.sub.3 content percentage of 0% to 30%, wherein at least any one of additive target elements is introduced, the additive target elements including, Si.sup.4+ of 1 mg/kg to 1,500 mg/kg, B.sup.3+ of 1 mg/kg to 1,500 mg/kg, P.sup.5+ of 1 mg/kg to 1,500 mg/kg, Li.sup.+ of 1 mg/kg to 1,500 mg/kg, Na.sup.+ of 1 mg/kg to 1,500 mg/kg, K.sup.+ of 1 mg/kg to 1,500 mg/kg, Mg.sup.2+ of 1 mg/kg to 1,500 mg/kg, Ca.sup.2+ of 1 mg/kg to 1,500 mg/kg, Al.sup.3+ of 1 mg/kg to 1,500 mg/kg, and Sr.sup.2+ of 1 mg/kg to 1,500 mg/kg.

A method for quantitatively characterizing a dendrite segregation and dendrite spacing of a high-temperature alloy ingot is disclosed. The method includes preparation and surface treatment of the high-temperature alloy ingot, selection of calibration sample and determination of an element content, establishment of quantitative method for elements in micro-beam X-ray fluorescence spectrometer, quantitative distribution analysis of element components of the high-temperature alloy, quantitative characterization of characteristic element line distribution of high-temperature alloy, and analysis of a characteristic element line distribution map and statistics of a secondary dendrite spacing.

A chemical state analysis apparatus 10 includes: an excitation source 11 configured to irradiate an irradiation region A of a predetermined surface in a sample S containing a battery material with an excitation rays for generating characteristic X-rays of the battery material; an analyzing crystal 13 of a flat plate arranged so as to face the irradiation region A; a slit 12 arranged between the irradiation region A and the analyzing crystal 13, the slit being arranged in parallel to the irradiation region A and a predetermined crystal plane of the analyzing crystal 13; an X-ray linear sensor 15 in which linear detecting elements 151 each having a length in a direction parallel to the slit 12 are arranged in a direction perpendicular to the slit; a wavelength spectrum generation unit 161 configured to generate a wavelength spectrum based on intensity of the characteristic X-rays detected by the X-ray linear sensor 15; a peak wavelength determination unit 162 configured to determine a peak wavelength which is a wavelength in a peak of the wavelength spectrum; and a chemical state specification unit 163 configured to specify a value for specifying a chemical state of the battery material in the sample S from the peak wavelength determined by the peak wavelength determination unit 162 and a standard curve representing a relation between a value representing the chemical state and the peak wavelength.

A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.

An X-ray spectrometer includes: an excitation source that irradiates a predetermined irradiation region on a surface of a sample with an excitation ray generating a characteristic X-ray; a flat plate analyzing crystal facing the irradiation region; a slit provided between the irradiation region and the analyzing crystal, the slit being parallel to a predetermined crystal plane of the analyzing crystal; a linear sensor including linear detection elements having a length in a direction parallel to the slit are arranged in a direction perpendicular to the slit; and an energy calibration unit that measures two characteristic X-rays in which energy is known by irradiating a surface of a standard sample generating the two characteristic X-rays with the excitation ray from the excitation source, and calibrates the energy of the characteristic X-ray detected by each detection element of the X-ray linear sensor based on the measured energies of the two characteristic X-rays.

A method and apparatus for rapid measurement and analysis of structure and composition of poly-crystal materials by X-ray diffraction and X-ray spectroscopy, which uses a two-dimensional energy dispersive area detector having an array of pixels, and a white spectrum X-ray beam source. A related data processing method includes separating X-ray diffraction and spectroscopy signals in the energy dispersive X-ray spectrum detected by each pixel of the two-dimensional energy dispersive detector; correcting the detected X-ray diffraction signals by a correction function; summing the corrected X-ray diffraction signals and X-ray spectroscopy signals, respectively, over all pixels to obtain an enhanced diffraction spectrum and an enhanced spectroscopy spectrum; using the enhanced diffraction and spectroscopy spectrum respectively to determine the structure and composition of the sample. The summing step includes using Bragg's equation to convert the intensity-energy diffraction spectrum for each pixel into an intensity-lattice spacing spectrum before summing them.

A method of fabricating a reference blade for calibrating non-destructive inspection by tomography of real blades of similar shapes and dimensions, including making a three-dimensional blank out of resin, creating housings in the thickness of the blank at predetermined locations, and introducing in each of the housings a cylinder including an artificial defect or a real defect in order to obtain the reference blade.

A method of analysing granular material in a slurry, the method comprising: compacting the granular material in the slurry to form one or more pucks; irradiating said pucks with X-Ray radiation and detecting X-ray energy transmitted through said one or more irradiated pucks; irradiating a reference material with X-Ray radiation, said reference material having known material characteristics and detecting X-ray energy transmitted through said reference material; comparing X-ray energy transmission through said one or more pucks with the reference material to compute, using a processing unit, one or more particle characteristics of the granular material in the one or more pucks.