A geological analysis system, device, and method are provided. The geological analysis system includes sensors, including an X-ray fluorescence (XRF) unit, which detect properties of geological sample materials, a sample tray which holds the geological sample materials therein, and a processor. The XRF unit includes a body and a separable head unit and an output port configured to emit helium onto the geological sample materials within the sample tray. The sample tray includes chambers formed in an upper surface, ports, and passages, each providing communication between an interior of a chamber and an interior of a port. The ports are configured to be attachable to vials. The processor is configured to automatically position at least one of the sensors and the sample tray with respect to the other of the at least one of the sensors and the sample tray and to control the sensors.

A charged particle detector includes a microchannel plate having an input surface having electrons (charged particles) input thereon, a multiplication portion performing multiplication of electrons while maintaining positional information of the electrons, and an output surface outputting electrons multiplied by the multiplication portion; a multi-dynode having a plurality of dynodes multiplying the electrons output from the output surface, and insulation regions positioned between the dynodes; and an anode disposed in a spatial region between the output surface and the multi-dynode, and having collection portions for collecting electrons multiplied by the dynodes and aperture portions for allowing electrons output from the output surface to pass therethrough to the dynodes side. All of the insulation regions overlap the collection portions when viewed in an output direction of the electrons from the output surface.

A radiation detector includes a radiation detection element, a circuit element, and a housing accommodating the radiation detection element and the circuit element, in which a closed space is provided. The housing has an unblocked opening portion, the closed space is disposed inside the housing, the circuit element is disposed in the closed space, and the closed space is decompressed or filled with an inert gas or a dry gas.

An electron beam detection apparatus for a semiconductor device and an electron beam detection assembly are disclosed, the electron beam detection apparatus including a stage, which is configured to carry and hold the semiconductor device at a top surface of the stage, and is translatable in two directions orthogonal to each other, an aiming device, configured to determine a position of the semiconductor device in a coordinate system of the electron beam detection apparatus by capturing an image of the semiconductor device, the aiming device provided with a first field of view and a first optical axis, and an electron beam detection device, configured to detect an emergent electron beam exiting the semiconductor device by projecting an electron beam to the semiconductor device, the electron beam detection device provided with a second field of view and a second optical axis which is not consistent with the first optical axis.

A method for measuring average thickness of a metal or alloy coating on a metal or alloy substrate using an X-ray fluorescence (XRF) spectrometer is used when the coating has an uneven surface at different distances from a measurement window of the XRF spectrometer. The method includes measuring elemental composition of the coating or substrate using the XRF spectrometer and obtaining the average thickness of the coating using a calibration relationship between coating thickness and elemental composition of the coating or substrate. The metal or alloy coating may be a metal or alloy coating of a plurality of outer armor wires wrapped around a cable. The method may be used to analyze coating thickness changes over time or along the length of the cable, or to analyze a corrosive environment in order to choose optimal material for a metal or alloy coating.

An analysis method includes: obtaining n×m pieces of map data by repeating, m times, a map measurement in which n pieces of map data are obtained by scanning a specimen with a primary probe to detect electrons emitted from the specimen with an electron spectrometer, while measurement energy ranges of an analyzer are varied; and generating a spectral map in which a position on the specimen is associated with a spectrum based on the n×m pieces of map data, the measurement energy ranges of m times of the map measurement not overlapping each other.

An X-ray fluorescence measurement apparatus has a sample tank, and a measurement unit that has an X-ray generator and an X-ray fluorescence detector. A film mechanism takes out a used film from a partitioning position between the sample tank and the measurement unit in a slide direction which intersects a direction of arrangement of the sample tank and the measurement unit, and feeds an unused film portion to the partitioning position in the slide direction. The film portions may alternatively be exchanged using cassettes.

A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

A method for analyzing a rock sample includes segmenting a digital image volume corresponding to an image of the rock sample, to associate voxels in the digital image volume with a plurality of rock fabrics of the rock sample. The method also includes identifying a set of digital planes through the digital image volume. The set of digital planes intersects with each of the plurality of rock fabrics. The method further includes machining the rock sample to expose physical faces that correspond to the identified digital planes, performing scanning electron microscope (SEM) imaging of the physical faces to generate two-dimensional (2D) SEM images of the physical faces, and performing image processing on the SEM images to determine a material property associated with each of the rock fabrics.

The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.