Provided is an energy-dispersive X-ray fluorescence spectrometer capable of easily determining reliability of a result of quantitative analysis and quickly recognizing an abnormality in measurement conditions, an X-ray fluorescence spectrometer, a sample, preprocessing for the sample, or the like. The energy-dispersive X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; a calculation unit configured to execute quantitative analysis for an element included in the sample based on a peak included in the spectrum; and an evaluation unit configured to calculate a plurality of evaluation values obtained using different calculation methods for a series of processes, being the process of acquiring the spectrum by the spectrum acquisition unit, and the process of executing the quantitative analysis by the calculation unit, and to calculate a comprehensive evaluation value obtained by composing the plurality of evaluation values.

A valence of a target element of a sample and crystallinity of a sample can be detected with a small device. The analysis device 100 includes: a placement holder 110 for placing a sample S; an X-ray source 11 for irradiating the sample S with X-rays; a first detector 141 for detecting characteristic X-rays generated from the sample S by the irradiation of the X-rays; a second detector 142 for detecting X-rays diffracted by the sample; and a signal processing device 20. The signal processing device 20 detects the valence of the target element of the sample based on the characteristic X-rays detected by the first detector 141, and detects the crystallographic data of the sample based on the X-rays detected by the second detector 142.

An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.

An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.

A measurement chamber (2) of an x-ray spectrometer (1) comprising a goniometer (3) for analyzing x-ray fluorescence radiation from a measuring sample (4) comprises an entrance opening for the entry of x-ray fluorescence radiation into the measurement chamber, a first goniometer arm (5) for holding and adjusting an analyzer crystal (5a), and a second goniometer arm (6) for holding and adjusting an x-ray detector (6a, 6b), wherein the measurement chamber is sealed in a vacuum-tight manner and the entrance opening for the x-ray fluorescence radiation is sealed in a vacuum-tight manner by way of a window (7). The measurement chamber is distinguished in that it contains a bearing block (8) for receiving and holding both goniometer arms in a concentric and rotatable manner, said goniometer arms each being mechanically adjustable by means of a plezo-motor (15, 16), which is securely connected to the bearing block or a drive plate (9′, 9″) of the respective goniometer arm, and in that the measurement chamber contains all mechanical components of the goniometer. This allows the provision of a more compact, lighter and more stable x-ray spectrometer comprising a rotatable goniorneter, which causes as little heat influx, into the overall system as possible. At the same time, the mechanical stability requirements in respect of the measurement chamber are minimized in order to reduce costs and weight.

A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

Characteristic X-rays (soft X-rays) from a sample are detected using a spectroscope to thereby generate a plurality of intensity spectrums arranged in order of time sequence. A contour map creation unit creates a contour map by converting, in accordance with a color conversion condition, the plurality of intensity spectrums into a plurality of one-dimensional maps, and arranging the plurality of one-dimensional maps in order of time sequence. When displaying the contour map, a waveform array and a difference contour map may also be displayed. Based on the contour map, a timepoint at which a state change occurs in the sample is determined.