Provided are an X-ray fluorescence spectrometer and a control method for an X-ray fluorescence spectrometer which are capable of preventing deterioration and breakage of a sample, and contamination of an inside of an apparatus even when an abnormality occurs in the X-ray fluorescence spectrometer. The X-ray fluorescence spectrometer includes: a measuring unit including: a moving mechanism configured to move a sample between a standby position and a measurement position; an X-ray source; a detector; and a first control unit; and an information processing unit including: an analysis unit; and a second control unit configured to control the measuring unit by communicating with the first control unit, the first control unit including retreat controller configured to perform retreat control for causing the moving mechanism to retreat the sample present at the measurement position to the standby position when communication between the first control unit and the second control unit is interrupted.

Provided are an X-ray fluorescence spectrometer and a control method for an X-ray fluorescence spectrometer which are capable of preventing deterioration and breakage of a sample, and contamination of an inside of an apparatus even when an abnormality occurs in the X-ray fluorescence spectrometer. The X-ray fluorescence spectrometer includes: a measuring unit including: a moving mechanism configured to move a sample between a standby position and a measurement position; an X-ray source; a detector; and a first control unit; and an information processing unit including: an analysis unit; and a second control unit configured to control the measuring unit by communicating with the first control unit, the first control unit including retreat controller configured to perform retreat control for causing the moving mechanism to retreat the sample present at the measurement position to the standby position when communication between the first control unit and the second control unit is interrupted.

A method of performing x-ray spectroscopy surface material analysis of a region of interest of a sample with an evaluation system that includes a scanning electron microscope (SEM) column, an x-ray detector and an x-ray polarizer, comprising: positioning a sample within a field of view of the scanning electron microscope; generating an electron beam having a landing energy about equal to an ionization energy of the materials within the region of interest of the sample; scanning the region of interest with the electron beam set to collide with the sample thereby generating x-rays emitted from near a surface of the sample, the x-rays including characteristic x-rays and Bremsstrahlung radiation; and detecting x-rays generated while the region of interest is scanned by the electron after the x-rays pass through the x-ray polarizer that blocks a higher percentage of the Bremsstrahlung radiation than the characteristic x-rays.

A method of performing x-ray spectroscopy surface material analysis of a region of interest of a sample with an evaluation system that includes a scanning electron microscope (SEM) column, an x-ray detector and an x-ray polarizer, comprising: positioning a sample within a field of view of the scanning electron microscope; generating an electron beam having a landing energy about equal to an ionization energy of the materials within the region of interest of the sample; scanning the region of interest with the electron beam set to collide with the sample thereby generating x-rays emitted from near a surface of the sample, the x-rays including characteristic x-rays and Bremsstrahlung radiation; and detecting x-rays generated while the region of interest is scanned by the electron after the x-rays pass through the x-ray polarizer that blocks a higher percentage of the Bremsstrahlung radiation than the characteristic x-rays.

An X-ray fluorescence analyzer is provided inside an analysis chamber covered with a housing with: an X-ray tube; an analyzing crystal for spectrally dispersing X-ray fluorescence emitted from a sample; an X-ray detector for detecting the X-ray fluorescence spectrally dispersed by the analyzing crystal; a warm air generator for generating warm air to maintain a temperature of the analyzing crystal at a target temperature; and a Peltier element for cooling the X-ray detector.

The invention described herein is a spectrometer having components allowing remote orientation of crystal analyzer and detector.

Provided are an X-ray fluorescence spectrometer and a control method for an X-ray fluorescence spectrometer which are capable of preventing deterioration and breakage of a sample, and contamination of an inside of an apparatus even when an abnormality occurs in the X-ray fluorescence spectrometer. The X-ray fluorescence spectrometer includes: a measuring unit including: a moving mechanism configured to move a sample between a standby position and a measurement position; an X-ray; a detector; and a first control unit; and an information processing unit including: an analysis unit; and a second control unit configured to control the measuring unit by communicating with the first control unit, the first control unit including retreat controller configured to perform retreat control for causing the moving mechanism to retreat the sample present at the measurement position to the standby position when communication between the first control unit and the second control unit is interrupted.

Provided are an X-ray fluorescence spectrometer and a control method for an X-ray fluorescence spectrometer which are capable of preventing deterioration and breakage of a sample, and contamination of an inside of an apparatus even when an abnormality occurs in the X-ray fluorescence spectrometer. The X-ray fluorescence spectrometer includes: a measuring unit including: a moving mechanism configured to move a sample between a standby position and a measurement position; an X-ray; a detector; and a first control unit; and an information processing unit including: an analysis unit; and a second control unit configured to control the measuring unit by communicating with the first control unit, the first control unit including retreat controller configured to perform retreat control for causing the moving mechanism to retreat the sample present at the measurement position to the standby position when communication between the first control unit and the second control unit is interrupted.

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.