G01N23/227

Analysis method and analysis apparatus

An analysis method includes: obtaining n×m pieces of map data by repeating, m times, a map measurement in which n pieces of map data are obtained by scanning a specimen with a primary probe to detect electrons emitted from the specimen with an electron spectrometer, while measurement energy ranges of an analyzer are varied; and generating a spectral map in which a position on the specimen is associated with a spectrum based on the n×m pieces of map data, the measurement energy ranges of m times of the map measurement not overlapping each other.

Spectroscopy and imaging system

An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.

ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD
20230071801 · 2023-03-09 ·

An electron beam application apparatus includes: an optical system configured to irradiate a sample with excitation light; an electron optical system configured to project, onto a camera, a photoelectron image formed by photoelectrons emitted from the sample irradiated with the excitation light; and a control unit. The optical system includes a light source configured to generate the excitation light and a pattern forming unit. The excitation light forms an optical pattern on a surface of the sample when the pattern forming unit is turned on, and the excitation light is emitted to the sample without forming the optical pattern on the surface of the sample when the pattern forming unit is turned off. The control unit adjusts the electron optical system based on feature data of a bright and dark pattern formed by the optical pattern in the photoelectron image obtained by turning on the pattern forming unit.

Deterioration analyzing method

The present invention provides a method of deterioration analysis that enables detailed analysis of the deterioration, especially of the surface, of a polymer material containing at least two diene polymers. The present invention relates to a method of deterioration analysis including: irradiating a polymer material containing at least two diene polymers with high intensity x-rays; and measuring x-ray absorption while varying the energy of the x-rays, to analyze the deterioration of each diene polymer.

CARBON-BASED OPTICAL SENSOR ELEMENT FOR MEASURING GREENHOUSE GAS CONCENTRATION

This application relates to an optical sensor element. In one aspect, the optical sensor element includes a graphite column including one or more graphite rods. The optical sensor element may also include one or more first graphene layers partly or entirely covering each of both ends of the graphite column. The optical sensor element may further include one or more second graphene layers partly or entirely covering the outer circumferential surface of the graphite column. This application also relates to an optical sensor for measuring the concentration of a greenhouse gas and the optical sensor includes the optical sensor element.

CARBON-BASED OPTICAL SENSOR ELEMENT FOR MEASURING GREENHOUSE GAS CONCENTRATION

This application relates to an optical sensor element. In one aspect, the optical sensor element includes a graphite column including one or more graphite rods. The optical sensor element may also include one or more first graphene layers partly or entirely covering each of both ends of the graphite column. The optical sensor element may further include one or more second graphene layers partly or entirely covering the outer circumferential surface of the graphite column. This application also relates to an optical sensor for measuring the concentration of a greenhouse gas and the optical sensor includes the optical sensor element.

X-RAY DETECTOR AND DRIVING METHOD THEREFOR

Disclosed is an x-ray detector includes a first electrode formed on a substrate, a photoconductive layer formed on the first electrode, a second electrode formed on the photoconductive layer and configured to be in a voltage applied state with a bias voltage or a floating state, and a power supply circuit configured to control an output of the bias voltage to be on/off.

ALUMINUM ALLOY MATERIAL AND BONDED OBJECT, AND AUTOMOTIVE MEMBER

An Al—Mg—Si aluminum alloy material includes Sn. An oxide film formed on a surface of the aluminum alloy material is analyzed by a semi-quantitative analysis by X-ray photoelectron spectroscopy. A ratio of the number of Sn atoms to the number of Mg atoms in the oxide film is 0.001 to 3 on average. A ratio of the total number of atoms of Sn and Mg to the number of oxygen atoms is 0.001 to 0.2 on average.

Apparatus for electrodeless measurement of electron mobility in nano material, apparatus for electrodeless measurement of hole mobility in nano material, method for electrodeless measurement of electron mobility in nano material, and method for electrodeless measurement of hole mobility in nano material

A method for measuring electron mobility according to the present invention, which is performed by an apparatus comprising a chamber forming a sealed space, an electron gun provided in the chamber, and a metal sample disposed opposite to the electron gun in the sealed space, comprises: an electron irradiation step of irradiating the metal sample with electrons by the electron gun; a sample current measurement step of applying a voltage to the metal sample to measure a sample current obtained in the metal sample according to the applied voltage; a secondary electron current calculation step of calculating a secondary electron current through the measured sample current; and an effective incident current definition step of defining the sum of the measured sample current and the calculated secondary electron current as an effective incident current.

Apparatus for electrodeless measurement of electron mobility in nano material, apparatus for electrodeless measurement of hole mobility in nano material, method for electrodeless measurement of electron mobility in nano material, and method for electrodeless measurement of hole mobility in nano material

A method for measuring electron mobility according to the present invention, which is performed by an apparatus comprising a chamber forming a sealed space, an electron gun provided in the chamber, and a metal sample disposed opposite to the electron gun in the sealed space, comprises: an electron irradiation step of irradiating the metal sample with electrons by the electron gun; a sample current measurement step of applying a voltage to the metal sample to measure a sample current obtained in the metal sample according to the applied voltage; a secondary electron current calculation step of calculating a secondary electron current through the measured sample current; and an effective incident current definition step of defining the sum of the measured sample current and the calculated secondary electron current as an effective incident current.