A moisture detector includes a sensor chip and a moisture determining unit. The sensor chip includes a humidity detector having a detection surface on which to measure humidity, and also includes a heater heating the detection surface, and the moisture determining unit is configured to, after causing the heater to start heating, determine whether moisture is present on the detection surface based on a difference in changes in the humidity measured by the humidity detector.

A moisture detector includes a sensor chip and a moisture determining unit. The sensor chip includes a humidity detector having a detection surface on which to measure humidity, and also includes a heater heating the detection surface, and the moisture determining unit is configured to, after causing the heater to start heating, determine whether moisture is present on the detection surface based on a difference in changes in the humidity measured by the humidity detector.

A humidity sensor system (10) includes a monolithically integrated semiconductor device (12). The monolithically integrated semiconductor device (12) includes an optical waveguide (14), a thermo-electric cooling device (16), a temperature measurement probe (18), and control circuitry (26) operable to cause the thermo-electric cooling device (16) to adjust a temperature of the monolithically integrated semiconductor device (12). The optical waveguide (14) is operable to receive an input optical signal from a light source (20) and to provide an output optical signal for sensing by a light detector (22). The humidity sensor system (10) further includes processing circuitry operable to receive output signals from the light detector (22) and from the temperature measurement probe (18) and operable to determine a relative humidity based on the output signals from the light detector (22) and the temperature measurement probe (18).

A humidity sensor system (10) includes a monolithically integrated semiconductor device (12). The monolithically integrated semiconductor device (12) includes an optical waveguide (14), a thermo-electric cooling device (16), a temperature measurement probe (18), and control circuitry (26) operable to cause the thermo-electric cooling device (16) to adjust a temperature of the monolithically integrated semiconductor device (12). The optical waveguide (14) is operable to receive an input optical signal from a light source (20) and to provide an output optical signal for sensing by a light detector (22). The humidity sensor system (10) further includes processing circuitry operable to receive output signals from the light detector (22) and from the temperature measurement probe (18) and operable to determine a relative humidity based on the output signals from the light detector (22) and the temperature measurement probe (18).

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include an environmental sensor disposed within the FOUP and configured to measure one or more environmental parameters of an interior environment of the FOUP; and a wireless transmitter disposed within the FOUP and in communication with the environmental sensor, wherein the wireless transmitter is configured to wirelessly transmit the one or more environmental parameters from the environmental sensor to a controller disposed outside of the FOUP to decide whether the one or more environmental parameters are within threshold limits and receive a message according to a decision of whether the one or more environmental parameters are within the threshold limits from the controller.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include an environmental sensor disposed within the FOUP and configured to measure one or more environmental parameters of an interior environment of the FOUP; and a wireless transmitter disposed within the FOUP and in communication with the environmental sensor, wherein the wireless transmitter is configured to wirelessly transmit the one or more environmental parameters from the environmental sensor to a controller disposed outside of the FOUP to decide whether the one or more environmental parameters are within threshold limits and receive a message according to a decision of whether the one or more environmental parameters are within the threshold limits from the controller.

An object of the present disclosure is to realize water immersion detection that does not require a replacement module, and does not cause any optical loss. The present disclosure relates to a device configured to measure guided acoustic wave Brillouin scattering in a measurement target optical fiber, and detect water immersion of the measurement target optical fiber based on a characteristic around a peak of the guided acoustic wave Brillouin scattering.

An object of the present disclosure is to realize water immersion detection that does not require a replacement module, and does not cause any optical loss. The present disclosure relates to a device configured to measure guided acoustic wave Brillouin scattering in a measurement target optical fiber, and detect water immersion of the measurement target optical fiber based on a characteristic around a peak of the guided acoustic wave Brillouin scattering.

A photonic quantum dew point sensor determines a dew point of an analyte and includes a common substrate; a photonic dew sensor on the common substrate and exposed for direct contact with the analyte; a photonic temperature sensor on the common substrate; an optomechanical temperature sensor on the common substrate; a dew sensor substrate interposed between the photonic dew sensor and the common substrate; a heater on the dew sensor substrate proximate to the photonic dew sensor; a temperature sensor substrate interposed between the common substrate and each of the photonic temperature sensor and the optomechanical temperature sensor; and a sensor cover on the photonic temperature sensor, the optomechanical temperature sensor, and the temperature sensor substrate to cover the photonic temperature sensor and the optomechanical temperature sensor to prevent direct contact between the analyte and each of the photonic temperature sensor and the optomechanical temperature sensor.

A photonic quantum dew point sensor determines a dew point of an analyte and includes a common substrate; a photonic dew sensor on the common substrate and exposed for direct contact with the analyte; a photonic temperature sensor on the common substrate; an optomechanical temperature sensor on the common substrate; a dew sensor substrate interposed between the photonic dew sensor and the common substrate; a heater on the dew sensor substrate proximate to the photonic dew sensor; a temperature sensor substrate interposed between the common substrate and each of the photonic temperature sensor and the optomechanical temperature sensor; and a sensor cover on the photonic temperature sensor, the optomechanical temperature sensor, and the temperature sensor substrate to cover the photonic temperature sensor and the optomechanical temperature sensor to prevent direct contact between the analyte and each of the photonic temperature sensor and the optomechanical temperature sensor.