An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Systems and method for automatically determining offset correction values in a differential measurement system, and for correcting measurement offsets between two measurement devices in the differential measurement system. A method for determining real-time offset corrections in a gas analysis system having first and second gas analyzers includes for each of a plurality of gas concentrations within a range of gas concentrations: a) supplying the concentration of gas to the first and second gas analyzers through first and second gas flow lines, respectively; b) measuring a first gas concentration value using the first gas analyzer; and c) measuring a second gas concentration value using the second gas analyzer. The method may also include determining an offset value between each corresponding first and second gas concentration value, and determining a functional relationship between the offset values and gas concentration measurements of the first gas analyzer.

A small-sized, portable enclosure protects a gas sensor against degradation due to environmental exposure and changes in atmospheric conditions. The protective enclosure includes an inlet for introduction of a gas into the enclosure, an outlet for release of the gas upon completion of a sensing run, and a number of in-line filters that remove from the inflowing gas sample analytes, contaminants, and other materials that can compromise the integrity of the sensor or cause the sensor to degrade over time. The enclosure does not include any filters during the measurement phase of the sensing run in order to allow the gas sensor to accurately measure an unmodified gas mixture and/or analyte.

A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

In a gas analysis apparatus including analyzers that need ignition, such as FIDs, in order to make it possible to surely ignite the analyzers while downsizing the entire apparatus, the apparatus includes first and second analyzers to accept a sample gas, a first gas line provided with the first analyzer, a second gas line provided with the second analyzer and joined downstream of the first analyzer in the first gas line. At least one of the first analyzer and the second analyzer is configured to cause pressure fluctuations in the gas line including the analyzer when analyzing the sample gas. A first backflow prevention mechanism is disposed between another of the analyzers and a junction of the gas lines. The first backflow prevention mechanism is configured to prevent a fluid from flowing backward from the one of the analyzers through the junction toward the another of the analyzers.

The invention relates to an electrochemical gas sensing apparatus for sensing one or more analytes, such as NO.sub.2 and/or O.sub.3, in a sample gas and a method of using same. The apparatus uses Mn.sub.2O.sub.3 as a filter for ozone. The Mn.sub.2O.sub.3 may take the form of a powder which may be unmixed, mixed with various PTFE particles sizes, formed into a solid layer deposited onto a membrane and/or pretreated with NO.sub.2.

The method for analyzing an ozone concentration comprising the steps of: providing at least one catalytic chamber having an ozone decomposition path between an inlet portion and an outlet portion thereof; receiving a sample flow of gas containing ozone by the inlet portion of the at least one catalytic chamber and along the ozone decomposition path; decomposing a totality of the ozone of the sample flow of gas into oxygen in an exothermic reaction along the ozone decomposition path of the catalytic chamber; measuring a first temperature value at a first position and measuring a second temperature value at a second position, the first and second positions being associated with the inlet and outlet portions; evaluating the ozone concentration of the sample flow of gas based on the temperature difference between the second temperature value and the first temperature value and calibration data; and generating a signal indicating the evaluated ozone concentration.

A small-sized, portable enclosure protects a gas sensor against degradation due to environmental exposure and changes in atmospheric conditions. The protective enclosure includes an inlet for introduction of a gas into the enclosure, an outlet for release of the gas upon completion of a sensing run, and a number of in-line filters that remove from the inflowing gas sample analytes, contaminants, and other materials that can compromise the integrity of the sensor or cause the sensor to degrade over time. The enclosure does not include any filters during the measurement phase of the sensing run in order to allow the gas sensor to accurately measure an unmodified gas mixture and/or analyte.

A small-sized, portable enclosure protects a gas sensor against degradation due to environmental exposure and changes in atmospheric conditions. The protective enclosure includes an inlet for introduction of a gas into the enclosure, an outlet for release of the gas upon completion of a sensing run, and a number of in-line filters that remove from the inflowing gas sample analytes, contaminants, and other materials that can compromise the integrity of the sensor or cause the sensor to degrade over time. The enclosure does not include any filters during the measurement phase of the sensing run in order to allow the gas sensor to accurately measure an unmodified gas mixture and/or analyte.

In order to secure a separation ability required for an oxidation catalyst such as a non-methane cutter, and to enable a sample gas to be measured accurately, this gas analyzing device is provided with a sample gas line where a sample gas flows, an analyzer that is provided in the sample gas line and that detects the concentration of a specific component contained in the sample gas, a catalyst that is arranged upstream of the analyzer in the sample gas line and that reacts with the sample gas, and a moisture concentration adjusting unit that is arranged upstream of the catalyst in the sample gas line to adjust the moisture concentration of the sample gas.