An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

A system and method of bio-cleaning an ignition interlock device (IID). The method comprises receiving a handheld unit of an IID in a fixtured arrangement with an IID calibration station, and applying, while maintaining the IID handheld unit in the fixtured arrangement, a bio-cleaning agent to at least one ingress port of the IID handheld unit in a consolidated IID bio-cleaning and IID calibration operation.

Embodiments of the present specification provide methods and systems for maintaining accuracy and precision of calibration for a detector. The methods and systems include reducing the humidity of an internal calibration assembly by directing flow path of dry air periodically through the internal calibration assembly.

In a method for operating a respiratory gas analysis device with at least one gas sensor, once a respiratory gas analysis has been carried out, the gas sensor is heated to a temperature that lies above a predefinable temperature threshold value.

According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.) a defined positive fluid pressure in the sensor chamber or (3.) a defined fluid flow, e.g. fluid throughput, through the sensor chamber.

A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

Described is an apparatus (1) for measuring odours comprising: a measuring chamber (2); an intake duct (4) having two ends, an inlet end (4a) in communication with the outside environment and an outlet end (4b) in connection with the measuring chamber; at least one sensor (3), positioned inside the measuring chamber (2) and designed for measuring the olfactory properties of a gas; a control unit (6) designed for processing signals coming from the at least one sensor (3) and providing a parameter representing the odours measured in the gas to be analysed; a suction device (5), positioned inside the intake duct (4) and designed to circulate the gas inside the apparatus (1); a cleaning device designed for restoring the characteristics of the at least one sensor (3) following a measurement, wherein the cleaning device is designed for generating ozone inside the apparatus (1).

This invention relates to a device for detecting fungal contamination in an interior environment, including: a concentration module (MC); a separation module (MS) including a chromatographic microcolumn; and a detection module (MD), characterized in that it includes at least one first solenoid valve (E3) upstream of the detection module (MD) enabling either to direct a flow containing target molecules toward the detection module (MD), or to direct a flow filtered by a first means for filtering (Tx1), enabling the detection module (MD) to be cleaned when the flow does not contain the target molecules. The invention also relates to a control interface of the device.

A gas sensor (2) distinguishes between a target gas and a contaminant and includes a light source (8), a measurement volume (4), a detector (22), and an adaptable filter system (20) with a first optical filter and a second optical filter. The filter system switches between a first composite state, with both filters in a reference state, a second composite state, with the first filter in a first reference state and the second filter in a second measurement state, a third composite state with the first filter in a first measurement state and the second filter in a second reference state, and a fourth composite state, with both filters in a measurement state. The gas sensor detects a target gas and makes a determination as to a presence of the contaminant by comparing the respective detector signals, generated during at least three of the composite states, with each other.

There is provided a gas analyzer apparatus that analyzes inflowing sample gas. The gas analyzer apparatus includes a filter unit that filters the sample gas, a detector unit that detects the result of filtering, a housing that houses these elements, and a control unit that controls the respective potentials of these elements. The control unit includes a cleaning control unit that sets the respective potentials of the filter unit, the detector unit, and the housing to cleaning potentials that draws in, as plasma for cleaning purposes, process plasma from a source that supplies the sample gas or plasma generated by a plasma generation unit.