A flow detector for detecting flow rates of fluid in pipes by measuring the temperature of the pipe and the ambient temperature and determining from the signals whether there is a flow in the pipe,by the shape of the temperature signals without providing any heat input to the pipe or fluid.

The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

A wind sensor has a housing and a wind detection element, which is rotatably mounted on the housing and is formed by a wind wheel having a cup-star including a plurality of cups, wherein at least one ohmic heating element is incorporated in the wind wheel. Structures are provided for transferring energy between the housing and the ohmic heating element rotating with the wind wheel. The structures can include a primary coil arranged in the housing and a secondary coil arranged in the wind wheel, wherein the secondary coil is connected to the ohmic heating element. The plurality of cups of the wind wheel are each mounted by way of flat webs, wherein the webs extend into the cups and divide the cups into two regions, and the at least one heating element is embedded in the webs and extends into the region of the cups.

A process fluid flow system includes a first pipe skin sensor and a second pipe skin sensor. The first pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a first location on the process fluid conduit. The second pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a second location on the process fluid conduit. Measurement circuitry is coupled to the first and second pipe skin sensors. A controller is coupled to the measurement circuitry and is configured to identify a process fluid flow condition based on signals from the first and second pipe skin sensors and to output an indication of the process fluid flow condition.

A flow detector for detecting flow rates of fluid in pipes by measuring the temperature of the pipe and the ambient temperature and determining from the signals whether there is a flow in the pipe, by the shape of the temperature signals without providing any heat input to the pipe or fluid.

Various control methods can indirectly determine incorrect connections between components in a respiratory therapy system. For example, incorrect connections can occur between a patient interface, a humidifier, and/or a gases source. The methods can indirectly detect if reverse flow conditions or other error conditions exist. A reverse flow condition can occur when gases flows in a direction different from an intended direction of flow. The methods can be implemented at the humidifier side, at the gases source side, or both.

Disclosed herein is a wind measuring system including a first flow sensor and plural second flow sensors. The first flow sensor and the plural second flow sensors each include a microheater including a board, an insulating film, and a heater. The board includes a first principal surface and a second principal surface. The board has defined therein an opening portion passing through the board along a direction from the first principal surface toward the second principal surface. The insulating film includes a peripheral portion disposed on the first principal surface, a central portion having the heater disposed thereon, and a connection portion extending from the central portion to be connected to the peripheral portion to support the central portion over the opening portion. The first flow sensor and the plural second flow sensors each output a signal that varies according to a change in electrical resistance value of the heater.

The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

A method of electronically deriving a conclusion of a condition of slurry flow in a non-vertical conduit having a conduit wall and which contains a slurry to flow or flowing along the conduit is provided.

A process fluid flow system includes a first pipe skin sensor and a second pipe skin sensor. The first pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a first location on the process fluid conduit. The second pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a second location on the process fluid conduit. Measurement circuitry is coupled to the first and second pipe skin sensors. A controller is coupled to the measurement circuitry and is configured to identify a process fluid flow condition based on signals from the first and second pipe skin sensors and to output an indication of the process fluid flow condition.