An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.

A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass along a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary and one secondary stopper elements. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

A high precision rotation sensor comprises an inertial mass suspended from a base wherein the mass is responsive to rotational inputs that apply loads to load-sensitive resonators whose changes in resonant frequency are related to the applied loads.

Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.

A vibration sensor includes a mass block supported with the aid of at least one spring in a manner allowing movement relative to a frame in a measuring direction, a displacement of the mass block in the measuring direction relative to the frame being detectable by a position-measuring device. The position-measuring device includes a measuring standard and a scanning head aligned with the measuring standard. One of these two components is secured on the mass block, and the other is secured on the frame.

A multi-axis, single mass acceleration sensor includes a three-dimensional frame, a test mass, a plurality of transducers, and a plurality of struts. The test mass may have three principal axes disposed within and spaced apart from the frame. The transducers are mechanically coupled to the frame. The struts are configured to couple to the central mass at each of the three principal axes, respectively, and to couple with respective sets of the transducers, thereby suspending the test mass within the frame. The sensor is thus responsive to translational motion in multiple independent directions and to rotational motion about multiple independent axes.

The arm motion sensor system includes at least one sensor attached to the body and positioned to detect arm motions, a control system for detecting when the arm motion is characteristic of a bad habit or activity that may spread infectious disease, and an alert system warning the user to refrain from such activity. In one embodiment, the sensor attached to the wrist and includes a 3-degree of freedom, 9-axis inertial measurement unit and an Edge TPU (Tensor Processing Unit). The wrist sensor communicates with a control system in the Cloud that includes an Artificial Intelligence (AI) unit that is trained to recognize undesirable motions. The wrist sensor includes an alarm system (tactile, auditory, or visual that warns the user to refrain from undesirable arm movements. Optionally, this system may also include an infrared sensor and WiFi MCU (microcontroller unit) positioned near the neck to screen out acceptable arm movements.

Systems and methods relating to sensors for measuring acceleration. Two attached containers are each filled with different liquids. At each junction of the two liquids, an indicator is placed. When acceleration forces are applied to the sensor, the indicator moves when the boundary between the two liquids similarly move. The amount of movement of the boundary and of the indicator is proportional to the amount of acceleration for applied. A tracking subsystem tracks the position of the indicator and, by determining the amount of movement of the indicator, the amount of acceleration force applied can be calculated. The indicator can be a particle or it can be a beam-like element that deflects when the boundary between the two liquids move.

The invention relates to a system for identifying at least one object at least partially immerged in a water area, said system comprising a capturing module comprising at least one camera, said at least one camera being configured to generate at least one sequence of images of said water area, and a processing module being configured to receive at least one sequence of images from said at least one camera and comprising at least one artificial neural network, said at least one artificial neural network being configured to detect at least one object in said at least one received sequence of images, extract a set of features from said at least one detected object, compare said extracted set of features with at least one predetermined set of features associated with a predefined object, identify the at least one detected object when the extracted set of features matches with the at least one predetermined set of features.