A controller applies a predetermined voltage to a fixed part detection excitation electrode to vibrate a movable part in a second direction and simultaneously applies a predetermined voltage to a fixed part drive electrode to vibrate the movable part in a first direction. The controller acquires, of the movable part, a first resonance frequency along the first direction and a second resonance frequency along the second direction. The controller controls a drive spring adjustment part to adjust a spring constant of the drive spring, such that the first resonance frequency is maintained constant, and controls a detection spring adjustment part to adjust a spring constant of the detection spring such that the second resonance frequency is maintained constant. The controller detects the angular velocity based on a result of synchronously detecting signal from the fixed part detection electrode with the first resonance frequency.

A controller applies a predetermined voltage to a fixed part detection excitation electrode to vibrate a movable part in a second direction and simultaneously applies a predetermined voltage to a fixed part drive electrode to vibrate the movable part in a first direction. The controller acquires, of the movable part, a first resonance frequency along the first direction and a second resonance frequency along the second direction. The controller controls a drive spring adjustment part to adjust a spring constant of the drive spring, such that the first resonance frequency is maintained constant, and controls a detection spring adjustment part to adjust a spring constant of the detection spring such that the second resonance frequency is maintained constant. The controller detects the angular velocity based on a result of synchronously detecting signal from the fixed part detection electrode with the first resonance frequency.

A method for monitoring a fluid carrying conduit by introducing an acoustic pulse into the conduit, and interrogating an optic fibre positioned along the path of said conduit to provide distributed acoustic sensing. By measuring the response at each of a plurality of locations, a conduit condition profile can be derived. A condition profile can be obtained quickly and easily with minimum disruption to the pipeline infrastructure and contained flow. Existing optic fibres running along the path of a pipe can be employed for sensing purposes, allowing relatively long spans of pipeline to be monitored with only limited access to the pipe.

A method for monitoring a fluid carrying conduit by introducing an acoustic pulse into the conduit, and interrogating an optic fibre positioned along the path of said conduit to provide distributed acoustic sensing. By measuring the response at each of a plurality of locations, a conduit condition profile can be derived. A condition profile can be obtained quickly and easily with minimum disruption to the pipeline infrastructure and contained flow. Existing optic fibres running along the path of a pipe can be employed for sensing purposes, allowing relatively long spans of pipeline to be monitored with only limited access to the pipe.

An ultrasonic air data system can include a pole having a length longer than a boundary layer thickness of a boundary layer flow such that at least a distal end of the pole is configured to extend outwardly from an aircraft surface to be at least partially outside of the boundary layer flow. The system can include a transmitter disposed on or in the pole at or near the distal end of the pole such that the transmitter is located at least partially outside of the boundary layer flow when in use, wherein the transmitter is configured to output a transmitter signal. The system can include one or more receivers disposed downstream of the pole as defined by the boundary layer flow and configured to receive the transmitter signal.

An ultrasonic air data system can include a pole having a length longer than a boundary layer thickness of a boundary layer flow such that at least a distal end of the pole is configured to extend outwardly from an aircraft surface to be at least partially outside of the boundary layer flow. The system can include a transmitter disposed on or in the pole at or near the distal end of the pole such that the transmitter is located at least partially outside of the boundary layer flow when in use, wherein the transmitter is configured to output a transmitter signal. The system can include one or more receivers disposed downstream of the pole as defined by the boundary layer flow and configured to receive the transmitter signal.

A microelectromechanical device structure comprises a supporting structure wafer. A cavity electrode is formed within a cavity in the supporting structure wafer. The cavity electrode forms a protruding structure from a base of the cavity towards the functional layer, and the cavity electrode is connected to a defined electrical potential. The cavity electrode comprises a silicon column within the cavity in the supporting structure wafer, which is partially or entirely surrounded by a cavity. One or more cavity electrodes may be utilized for adjusting a frequency of an oscillation occurring within the functional layer.

A microelectromechanical device structure comprises a supporting structure wafer. A cavity electrode is formed within a cavity in the supporting structure wafer. The cavity electrode forms a protruding structure from a base of the cavity towards the functional layer, and the cavity electrode is connected to a defined electrical potential. The cavity electrode comprises a silicon column within the cavity in the supporting structure wafer, which is partially or entirely surrounded by a cavity. One or more cavity electrodes may be utilized for adjusting a frequency of an oscillation occurring within the functional layer.

A semiconductor device includes an insulating substrate having a metal plate, an insulating resin plate, and a circuit plate laminated in order; a semiconductor element fixed to the circuit plate; a wiring member connected to an electrode disposed on a front surface of the semiconductor element or to the circuit plate of the insulating substrate; a housing accommodating the insulating substrate, the semiconductor element, and the wiring member; and a sealing material including a thermosetting resin, and sealing the insulating substrate, the semiconductor element, and the wiring member accommodated in the housing. The circuit plate of the insulating substrate is selectively formed on the insulating resin plate as a combination of a circuit pattern with a sealing material adhering pattern.

A sensor includes a sensor element configured to measure a physical variable. At least one elastic damping element is configured to damp external interfering vibrations. The at least one elastic damping element is configured to electrically and/or mechanically contact the sensor element.