The invention relates to an arrangement having a measuring apparatus for a scanning probe microscope, comprising: a sample receptacle, which is designed to receive a measurement sample for an examination by scanning probe microscopy; a measuring probe, which is received on a probe holder; a relocating device, which has a drive and is designed to relocate the sample receptacle and the probe holder having the measuring probe relative to each another by means of the drive for the examination by scanning probe microscopy; and an active counterweight device having a counterweight and a drive device associated with the counterweight, the active counterweight device being designed to move the counterweight during the measuring operation by means of the drive device, counter to the movement of the probe holder having the measuring probe. The invention furthermore relates to a method for operating the arrangement.

The invention relates to an arrangement having a measuring apparatus for a scanning probe microscope, comprising: a sample receptacle, which is designed to receive a measurement sample for an examination by scanning probe microscopy; a measuring probe, which is received on a probe holder; a relocating device, which has a drive and is designed to relocate the sample receptacle and the probe holder having the measuring probe relative to each another by means of the drive for the examination by scanning probe microscopy; and an active counterweight device having a counterweight and a drive device associated with the counterweight, the active counterweight device being designed to move the counterweight during the measuring operation by means of the drive device, counter to the movement of the probe holder having the measuring probe. The invention furthermore relates to a method for operating the arrangement.

A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.

The invention relates to a measuring device for a scanning probe microscope that comprises the following: a sample receptacle which is configured to receive a measurement sample to be examined; a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured; a displacement device which is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device that is configured to detect movement measurement signals for an actual movement of the measuring probe and/or of the sample receptacle that is executed during the relative movement between the measuring probe and the sample receptacle in order to measure the measurement sample, and to relay the movement measurement signals to the control device, the movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. The control device is configured to control the relative movement between the measuring probe and the sample receptacle in such a way that the displacement device is acted upon by the control device with compensating control signal components which cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction. Furthermore, a scanning probe microscope comprising the measuring device and a method for scanning probe microscopic examination of a measurement sample by means of a scanning probe microscope are provided.

An active noise isolation apparatus and method for cancelling vibration noise from the probe signal of a scanning tunneling microscope by generating a correction signal by convolution based on the probe signal and the sensor signal, which is based on the ambient vibration that adds noise to the probe signal.

An active noise isolation apparatus and method for cancelling vibration noise from the probe signal of a scanning tunneling microscope by generating a correction signal by convolution based on the probe signal and the sensor signal, which is based on the ambient vibration that adds noise to the probe signal.

A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.

System and method for optical drift correction uses light from a light source that is reflected from a curved surface of a mirror and detected at photosensitive detectors to detect movements of the mirror with respect to the light source.

System and method for optical drift correction uses light from a light source that is reflected from a curved surface of a mirror and detected at photosensitive detectors to detect movements of the mirror with respect to the light source.

A scanning probe microscopy system for mapping nanostructures on a surface of a sample, comprises a metrology frame, a sensor head including a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system comprises a clamp for clamping of the sample, which clamp is fixed to the metrology frame and arranged underneath the sensor head. The clamp is arranged for locally clamping of the sample in a clamping area underneath the probe tip, the clamping area being smaller than a size of the sample such as to clamp only a portion of the sample. Moreover, a metrology frame for use in scanning probe microscopy system as described includes a clamp for clamping of a sample, wherein the clamp is fixed to the metrology frame such as to be arranged underneath the sensor head.