The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.

The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.

Scanning Probe Microscope (SPM) system configured with the use of a composite material employing a non-metallic matrix and at least one of diamond particles, fused silica particles, boron carbide particles, silicon carbide particles, aluminum oxide particles, carbon fiber elements, carbon nanotube elements, and doped diamond particles to increase the structural integrity and/or strength of the SPM system, and a fraction of reinforcement ranging from at least 25% to at least 75% with advantageous modification of the Young's modulus, coefficient of thermal expansion, and thermal conductivity.

A detection device having an attached probe, the detection device including a base body (100) and a probe (200). The base body (100) is provided with a stage (140), the probe (200) is provided with a probe base body (210) and a tip (220) extending from a side surface of one end of the probe base body (210), another end of the probe base body (210) is adhered to the base body (100) via an adhesion piece (230), the probe base body (210) can be removed from the base body (100), and the tip (220) is close to the stage (140) and deployed in the direction thereof. The probe base body (210) is directly attached to the base body (100) and easily removed therefrom. It is therefore easy to replace the probe (200).

A detection device having an attached probe, the detection device including a base body (100) and a probe (200). The base body (100) is provided with a stage (140), the probe (200) is provided with a probe base body (210) and a tip (220) extending from a side surface of one end of the probe base body (210), another end of the probe base body (210) is adhered to the base body (100) via an adhesion piece (230), the probe base body (210) can be removed from the base body (100), and the tip (220) is close to the stage (140) and deployed in the direction thereof. The probe base body (210) is directly attached to the base body (100) and easily removed therefrom. It is therefore easy to replace the probe (200).

The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.

The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.

A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.

A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.

The invention relates to a measuring device for a scanning probe microscope that includes a sample receptacle which is configured to receive a measurement sample to be examined, a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured. A displacement device is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction. Movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. Compensating control signal components cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction.