Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

A sensor integrated circuit including a regulator for generating a regulated voltage includes a digital load configured to draw a load current from the regulator in response to a clock signal during in situ operation and a comparator configured to determine the absence or presence of a fault during in situ operation. The load current is less than or equal to a predetermined level in the absence of a fault and is greater than the predetermined level in the presence of a fault. The comparator is responsive to the load current and to a threshold level and is configured to generate a comparator output signal having a level indicative of whether the load current is less than or greater than the threshold level in order to thereby determine the absence or presence of a fault during in situ operation, respectively.

Provided is an electrostatic capacitance sensor which can remove an influence of a noise occurring from a static eliminator or a driving source and accurately perform measurement even on electrostatic capacitance detected by a thin-type detection unit which can be passed to a finger surface of a wafer transfer robot. The present invention is provided with an AC supply source which supplies an AC voltage to a detection unit, a parasitic capacitance compensation circuit, an operational amplifier, a differential amplifier, a phase detection means, and a low pass filter. An operational amplification output terminal is connected to an inversion input terminal of the differential amplifier through a first band pass filter, the AC supply source is connected to a non-inversion input terminal of the differential amplifier through a second band pass filter, an output terminal of the differential amplifier is connected to an input terminal of the phase detection means, and the phase detection means takes, as a reference signal, an AC signal output from the AC supply source.

A busbar current sensor assembly includes a busbar member that includes a first cavity and a second cavity. The second cavity is disposed opposite the first cavity. The busbar current sensor assembly also includes a first current sensor disposed in the first cavity such that the first cavity at least partially surrounds the first current sensor and a second current sensor disposed in the second cavity such that the second cavity at least partially surrounds the second current sensor.

A busbar current sensor assembly includes a busbar member that includes a first cavity and a second cavity. The second cavity is disposed opposite the first cavity. The busbar current sensor assembly also includes a first current sensor disposed in the first cavity such that the first cavity at least partially surrounds the first current sensor and a second current sensor disposed in the second cavity such that the second cavity at least partially surrounds the second current sensor.

A multi-electrode capacitive sensor is introduced to measure a spatial distribution of impedances to ground. The sensor can be used to identify the location of the highest impedance on the seating surface and can be a two-electrode sensor with a first electrode covering a central zone of a seat cushion and a second electrode with two galvanically connected electrode members, wherein each electrode member covers one side region of the seat cushion such that the first antenna electrode is arranged between the two electrode members of the second antenna electrode, or a two-electrode sensor with a left and right design. By measuring the difference of the impedance to ground between the two zones the system can get a simplified picture of the impedance distribution on the seating surface. This information can be used to distinguish between grounded structures such as (ISOFIX) child restraint systems and human occupants.

A multi-electrode capacitive sensor is introduced to measure a spatial distribution of impedances to ground. The sensor can be used to identify the location of the highest impedance on the seating surface and can be a two-electrode sensor with a first electrode covering a central zone of a seat cushion and a second electrode with two galvanically connected electrode members, wherein each electrode member covers one side region of the seat cushion such that the first antenna electrode is arranged between the two electrode members of the second antenna electrode, or a two-electrode sensor with a left and right design. By measuring the difference of the impedance to ground between the two zones the system can get a simplified picture of the impedance distribution on the seating surface. This information can be used to distinguish between grounded structures such as (ISOFIX) child restraint systems and human occupants.

A high-voltage sensing device providing full galvanic isolation between a high-voltage domain and a low-voltage domain, wherein the circuit topology of the device resembles that of a Wheatstone bridge, the Wheatstone bridge employing at least one voltage-controlled semiconductor resistor, wherein the circuit also comprises a reference source connected directly to the Wheatstone bridge and the device comprises a number of shielding structures to electrically isolate the high-voltage domain from the low-voltage domain.

A high-voltage sensing device providing full galvanic isolation between a high-voltage domain and a low-voltage domain, wherein the circuit topology of the device resembles that of a Wheatstone bridge, the Wheatstone bridge employing at least one voltage-controlled semiconductor resistor, wherein the circuit also comprises a reference source connected directly to the Wheatstone bridge and the device comprises a number of shielding structures to electrically isolate the high-voltage domain from the low-voltage domain.