A detection and charge neutralization device comprises a vacuum chamber, an electrical optical system, and a charge neutralization member. The electrical optical system and the charge neutralization member are disposed inside the vacuum chamber. The electrical optical system, outputs a charged particle beam to an observation position of the vacuum chamber. The charge neutralization member provides a focused vacuum ultraviolet light to the observation position to neutralize the accumulating charges.

An electrospray ionization system used in mass spectrometry provides for improved current measurement. The system includes a fluid union, a fluid column coupled with a first port of the fluid union, a power source coupled with the fluid union and configured to apply a voltage potential to the fluid union, and an electrospray emitter coupled with a second port of the fluid union. The power source is coupled with the first port and configured to apply the voltage potential to the first port to restrict current leakage from the fluid union. The current sensing circuit is configured to determine an electrical current flow between the power source and the at least one of the fluid union and the first port.

The present invention comprises novel methods of continuously monitoring the performance of an atmospheric pressure ionization (API) system. The methods of the invention allow for improved quality monitoring of the processes that leads to the formation of ions at atmospheric pressure. The methods of the invention further allow for continuously monitoring for the quality of the ion formation process in API without the addition of extraneous material (such as labelled compounds or control known compounds) to the system being monitored.

A Fast Faraday Cup includes a group of electrodes including a grounded electrode having a through hole and a collector electrode configured with a blind hole that functions a collector hole. The electrodes are configured to allow a beam (e.g., a non-relativistic beam) to fall onto the grounded electrode so that the through hole cuts a beamlet that flies into the collector hole and facilitates measurement of the longitudinal distribution of particle charge density in the beam. The diameters, depths, spacing and alignment of the collector hole and the through hole are controllable to enable the Fast Faraday day cup to operate with a fast response time (e.g., fine time resolution) and capture secondary particles.

A device of detecting a current from a sensor is disclosed. The device includes an integrating circuit including a network of capacitors for providing a gain setting and configured to convert the current to a voltage ramp over a length of integration time, the integrating circuit further including a reset switch configured to connect an input and an output of the network of capacitors; an ADC configured to digitize the voltage ramp into a plurality of voltage samples; and a set of modules including an analyzing module configured to analyze the plurality of voltage samples to determine a slope of the voltage ramp; an outputting module configured to determine a magnitude of the current based on the slope of the voltage ramp and the gain setting; and a reconfiguring module that is configured to reconfigure the network of capacitors and reset the voltage ramp via the reset switch.

An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.

A wide dynamic range trans-impedance amplifier includes a first trans-impedance amplifier configured to receive a first input current and produce a first voltage as a function of the first input current, and a second trans-impedance amplifier configured to receive a second input current and produce a second voltage as a function of the second input current. A current steering element causes a first portion of current from a current source to flow to the first trans-impedance amplifier until the first current portion reaches the first threshold current, and causes a second portion of current from the current source to flow to the second trans-impedance amplifier, until the second current portion reaches the second threshold current. The second current portion is current from the current source that exceeds the first threshold current. The wide dynamic range trans-impedance amplifier may receive, for example, ion collector current from a hot cathode ionization gauge (HCIG).

Examples of a system for generating and confining a compact toroid are disclosed. The system comprises a plasma generator for generating magnetized plasma, a flux conserver for receiving the compact toroid, a power source for providing current pulse and a controller for actively controlling a current profile of the pulse to keep plasma's q-profile within pre-determined range. Examples of methods of controlling a magnetic lifetime of a magnetized plasma by controlling a current profile of the current pulse are disclosed.

A low-OH-content quartz glass with an OH content equal to or lower than 5 ppm is used as a cylindrical tube (2) covering the surface of metallic plasma generation electrodes (4, 5 and 6) for generating a low-frequency barrier discharge. It has been found that, in the low-frequency barrier discharge, hydrogen and oxygen originating from the OH contained in a dielectric material are released into plasma gas for a long period of time, constituting a primary cause of an increase in the baseline current. The use of a low-OH-content quartz glass dramatically lowers the baseline current and thereby improves the S/N ratio and the detection limit.

A method of detecting an open arc in a DC plasma arc furnace which is based on detecting a linear decrease in the log of the magnitude of the frequency spectrum of the voltage between the anode and cathode.