Patent classifications
G02B7/182
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
A drive device comprises a drive unit, a source, a filter unit, and a determining unit.
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
A drive device comprises a drive unit, a source, a filter unit, and a determining unit.
DEVICE FOR THE SPHERICAL ORIENTATION OF AN OPTICAL ELEMENT, IN PARTICULAR FOR DIRECTING A LIGHT BEAM, SUCH AS A LASER BEAM
A device for the spherical orientation of an optical element is provided comprising a support structure, the optical element having an optically useful surface adapted to interact with an incident light beam, a mechanism mounted on support structure and capable of rotating the optical element in space around a first and second rotation axis perpendicular to each other.
The mechanism comprises a first rotating assembly around the first rotation axis and a second rotating assembly around the second rotation axis, which first rotating assembly has a through cavity defined around the first rotation axis, the through cavity being adapted to be crossed by the light beam and facing the optical element.
The mechanism comprises at least a first electromagnetic actuator arranged to rotate the first rotating assembly and at least a second electromagnetic actuator arranged to rotate the second rotating assembly.
DEVICE FOR THE SPHERICAL ORIENTATION OF AN OPTICAL ELEMENT, IN PARTICULAR FOR DIRECTING A LIGHT BEAM, SUCH AS A LASER BEAM
A device for the spherical orientation of an optical element is provided comprising a support structure, the optical element having an optically useful surface adapted to interact with an incident light beam, a mechanism mounted on support structure and capable of rotating the optical element in space around a first and second rotation axis perpendicular to each other.
The mechanism comprises a first rotating assembly around the first rotation axis and a second rotating assembly around the second rotation axis, which first rotating assembly has a through cavity defined around the first rotation axis, the through cavity being adapted to be crossed by the light beam and facing the optical element.
The mechanism comprises at least a first electromagnetic actuator arranged to rotate the first rotating assembly and at least a second electromagnetic actuator arranged to rotate the second rotating assembly.
CLAMPS FOR OPERABLY COUPLING AN OPTICAL COMPONENT TO A MOUNTING BLOCK, AND METHODS AND SYSTEMS FOR USING THE SAME
Clamps for operably coupling one or more optical components to a mounting block are provided. Clamps of interest include a frame and one or more flexure tabs attached to the frame. Light detection modules and systems including one or more clamps are also provided. Aspects of the disclosure additionally include methods for analyzing a sample and assembling a light detection module.
CLAMPS FOR OPERABLY COUPLING AN OPTICAL COMPONENT TO A MOUNTING BLOCK, AND METHODS AND SYSTEMS FOR USING THE SAME
Clamps for operably coupling one or more optical components to a mounting block are provided. Clamps of interest include a frame and one or more flexure tabs attached to the frame. Light detection modules and systems including one or more clamps are also provided. Aspects of the disclosure additionally include methods for analyzing a sample and assembling a light detection module.
ACTIVE ALIGNMENT MACHINE
An active alignment machine includes a base, a first pillar, a second pillar, a distribution module, a first alignment module, a second alignment module and a third alignment module. The first pillar has a first pillar top surface. The second pillar has a second pillar top surface. The first pillar top surface and the second pillar top surface cooperatively support plural assembling specifications. The distribution module is installed on the base and arranged between the first pillar and the second pillar. The first alignment module, the second alignment module and third alignment module are replaceable to be assembled with or dissembled from the first pillar top surface and the second pillar top surface. The first alignment module, the second alignment module and third alignment module work with the distribution module to perform the active alignment on a first-type product, a second-type product and a third-type product, respectively.
2D bi-pod flexure design, mount technique and process for implementation
A bipod flexure mount couples an optic to a base while isolating the optic from strain to resist wavefront error. The bipod flexure mount has a distal attachment pad to be coupled to the optic and a proximal attachment pad to be coupled to the base. A pair of beams extend between and couple the distal and proximal attachment pads. The distal attachment pad, the proximal attachment pad and the pair of beams are disposed in and define a planar layer with opposite planar surfaces that are substantially parallel. The bipod flexure mount is relatively flexible about four degrees of freedom and is relatively stiff about two degrees of freedom.
2D bi-pod flexure design, mount technique and process for implementation
A bipod flexure mount couples an optic to a base while isolating the optic from strain to resist wavefront error. The bipod flexure mount has a distal attachment pad to be coupled to the optic and a proximal attachment pad to be coupled to the base. A pair of beams extend between and couple the distal and proximal attachment pads. The distal attachment pad, the proximal attachment pad and the pair of beams are disposed in and define a planar layer with opposite planar surfaces that are substantially parallel. The bipod flexure mount is relatively flexible about four degrees of freedom and is relatively stiff about two degrees of freedom.
Optical member driving mechanism
An optical element driving mechanism is provided and includes a movable portion and a fixed portion. The movable portion includes a carrier for carrying an optical member with a first optical axis. The fixed portion has a top surface, a first side surface and a second side surface. The top surface extends in a direction that is parallel to the first optical axis. The first side surface and the second side surface extend in a direction that is not parallel to the first optical axis from the edge of the top surface and face different sides of the optical member. The shortest distance between the optical member and the first side surface is shorter than the shortest distance between the optical member and the second side surface.