Disclosed is an apparatus for coupling an SiC reflex mirror, configured to mount an SiC reflex mirror formed on a plurality of points and having a cylindrical portion on one surface thereof, to a mounting plate. The apparatus includes: an insertion portion having a vertical portion having a curved shape and attached to inside of the cylindrical portion, and a horizontal portion integrally formed with the vertical portion and formed to cross the vertical portion; an adhesive provided between the vertical portion and an inner circumferential surface of the cylindrical portion, and configured to attach the insertion portion to the cylindrical portion; a fixing portion having one end fixed to the horizontal portion, having another end fixed to the mounting plate, and configured to fix the SiC reflex mirror to the mounting plate; and a coupling member configured to fix the fixing portion to the insertion portion.

Disclosed is an apparatus for coupling an SiC reflex mirror, configured to mount an SiC reflex mirror formed on a plurality of points and having a cylindrical portion on one surface thereof, to a mounting plate. The apparatus includes: an insertion portion having a vertical portion having a curved shape and attached to inside of the cylindrical portion, and a horizontal portion integrally formed with the vertical portion and formed to cross the vertical portion; an adhesive provided between the vertical portion and an inner circumferential surface of the cylindrical portion, and configured to attach the insertion portion to the cylindrical portion; a fixing portion having one end fixed to the horizontal portion, having another end fixed to the mounting plate, and configured to fix the SiC reflex mirror to the mounting plate; and a coupling member configured to fix the fixing portion to the insertion portion.

A micromechanical mirror device has: a plate-shaped mirror having a reflecting surface for reflecting light, the reflecting surface being configured to be planar; a closed frame structure supporting the plate-shaped mirror and completely framing an edge of the plate-shaped mirror; a spring arrangement having at least two spring structures arranged mirror-symmetrically and connecting the closed frame structure to a stationary support structure, the spring arrangement being configured such that the closed frame structure and the plate-shaped mirror can be brought into a resonant vibrational state with respect to the support structure; and a connecting arrangement having at least four connecting spring structures arranged mirror-symmetrically and each connecting the plate-shaped mirror to the closed frame structure; the connecting spring structures being configured to be elastically deformable and arranged such that they deform back and forth in the resonant vibrational state so that the plate-shaped mirror is partially mechanically decoupled from the closed frame structure.

A micromechanical mirror device has: a plate-shaped mirror having a reflecting surface for reflecting light, the reflecting surface being configured to be planar; a closed frame structure supporting the plate-shaped mirror and completely framing an edge of the plate-shaped mirror; a spring arrangement having at least two spring structures arranged mirror-symmetrically and connecting the closed frame structure to a stationary support structure, the spring arrangement being configured such that the closed frame structure and the plate-shaped mirror can be brought into a resonant vibrational state with respect to the support structure; and a connecting arrangement having at least four connecting spring structures arranged mirror-symmetrically and each connecting the plate-shaped mirror to the closed frame structure; the connecting spring structures being configured to be elastically deformable and arranged such that they deform back and forth in the resonant vibrational state so that the plate-shaped mirror is partially mechanically decoupled from the closed frame structure.

A method includes rotating a mirror assembly in a first direction using an actuator. The mirror assembly is rotationally coupled to a base and includes a mirror. A first end of the mirror is rotationally coupled to the base, and a second end of the mirror is not supported by or attached to another structure. The method also includes rotating a reaction inertia assembly in a second direction opposite the first direction using the actuator. The reaction inertia assembly is rotationally coupled to the base. The method further include restricting movement of the mirror assembly and the reaction inertia assembly in multiple degrees of freedom using multiple flexures.

A mirror includes an optical portion including an optical surface opposite to a rear surface of the optical portion; and a mounting stem protruding from the rear surface of the optical portion and configured to mount to an optical mount.

A mirror includes an optical portion including an optical surface opposite to a rear surface of the optical portion; and a mounting stem protruding from the rear surface of the optical portion and configured to mount to an optical mount.

An optomechanical device having an interface that is mounted to another interface wherein the two interfaces are made of materials having the same or similar coefficients of thermal expansion and within the optomechanical device is an interface that is designed to compensate for the second mechanical component that is made of materials having the same or similar coefficients of thermal expansion as the optic or photonic device or instrument being held or controlled altogether with a fully constrained set of slip planes making for an optical mechanical device consisting of two or more materials that have coefficients of thermal expansion that are suitably matched to the materials it is being mounted to and the materials it is holding or controlling.

An optomechanical device having an interface that is mounted to another interface wherein the two interfaces are made of materials having the same or similar coefficients of thermal expansion and within the optomechanical device is an interface that is designed to compensate for the second mechanical component that is made of materials having the same or similar coefficients of thermal expansion as the optic or photonic device or instrument being held or controlled altogether with a fully constrained set of slip planes making for an optical mechanical device consisting of two or more materials that have coefficients of thermal expansion that are suitably matched to the materials it is being mounted to and the materials it is holding or controlling.

A mirror support includes a first rod in which one end is connected to an arm at a position closer to a side of a first pad fixed to the mirror with respect to a second pad fixed to the mirror while the other end stretched and inclined onto the side of first pad from the position connected is connected to a support structure; a first-rod elastic body that is an elastic body constituting the first rod; a second rod in which one end is connected to arm at a position closer to a side of second pad with respect to first pad while the other end stretched and inclined onto the side of second pad from the position connected is connected to the support structure; and a second-rod elastic body that is an elastic body constituting the second rod.