Methods for fabricating stamps and systems for patterning a substrate, and devices resulting from those methods are provided.

A method of fabricating a laminated magnetic core including: fabricating a magnetic-core mold on a surface, the magnetic-core mold including a first wall portion having a first sidewall, a second wall portion having a second sidewall, the second sidewall located opposite the first sidewall, the first and second sidewalls and a portion of the surface defining a mold cavity having a bottom width that is greater than a top width; depositing a seed material on the mold top surface and on a portion of the surface so as to form a conductive layer, wherein the seed material is directed toward the mold top surface and the portion of the surface of the substrate at an angle of incidence that substantially prevents deposition of the seed material on the first and second sidewalls; forming a magnetic layer on the conductive layer; and forming an insulating-sealing layer on the magnetic layer.

A method includes providing a coating (208) over a first surface (202) of a substrate (204) and over a metasurface (200) on the first surface of the substrate; and imprinting the coating to cause a surface of the coating to have a predetermined characteristic. A device includes a substrate; a metasurface on a first surface of the substrate; and a coating on the metasurface and on the first surface of the substrate, a surface of the coating defining a functional structure.

A method of casting a product includes the steps of: creating a finished photopolymer mold; introducing liquid into the mold; hardening the liquid; and removing the photopolymer mold. A casting mold and a method of making a casting mold, are also disclosed.

Embodiments of the microfluidic device may include of an array of microfluidic cell capture chambers, each functionalized with a different antibody to recognize a target antigen, and a network of code-multiplexed Coulter counters placed at strategic nodes across the device to quantify the fraction of cell population captured in each microfluidic chamber. For example, an apparatus may comprise a fluid inlet port divided into a plurality of separate microfluidic paths, each separate microfluidic path configured to transport a plurality of cells, the plurality of separate microfluidic paths, each comprising a plurality of microfluidic cell capture chambers, an outlet port to discharge a merged output of cells from the plurality of microfluidic cell capture chambers, and a plurality of sensors to detect cells passing into or out of a microfluidic cell capture chamber.

According to one embodiment, an imprint lithography template comprises a substrate transparent to ultraviolet light. A first mesa region is on the substrate. A surface of the first mesa region includes a pattern region to be pressed into a photocurable resist film. The pattern region having four sides. A second mesa region is also on the substrate. The first mesa region protrudes from a surface of the second mesa region. A blocking film is adjacent to two sides of the four sides pattern region. The two sides to which the blocking film is adjacent are connected to each other at a corner of the pattern region. The blocking film blocks ultraviolet light.

Multiple patterning approaches using radiation sensitive organometallic materials is described. In particular, multiple patterning approaches can be used to provide distinct multiple patterns of organometallic material on a hardmask or other substrate through a sequential approach that leads to a final pattern. The multiple patterning approach may proceed via sequential lithography steps with multiple organometallic layers and may involve a hardbake freezing after development of each pattern. Use of an organometallic resist with dual tone properties to perform pattern cutting and multiple patterning of a single organometallic layer are described. Corresponding structures are also described.

A method for manufacturing a phase mask and a lens-less camera module comprises the steps of: obtaining a replica mold on which an inverted phase shift pattern is formed in which a phase shift pattern of a master phase mask spaced apart from an image sensor is inverted; calculating a thickness of a phase mask disposed on the image sensor replacing the master phase mask; arranging a photocurable material for implementing the phase mask on the image sensor to a calculated thickness, placing the replica mold on an upper surface of the photocurable material, and then curing the photocurable material; and removing the replica mold from the top of the phase mask, so that the focal distance change or parallel movement does not occur depending on the position of the phase mask.

A method of fabricating a laminated magnetic core including: fabricating a magnetic-core mold on a surface, the magnetic-core mold including a first wall portion having a first sidewall, a second wall portion having a second sidewall, the second sidewall located opposite the first sidewall, the first and second sidewalls and a portion of the surface defining a mold cavity having a bottom width that is greater than a top width; depositing a seed material on the mold top surface and on a portion of the surface so as to form a conductive layer, wherein the seed material is directed toward the mold top surface and the portion of the surface of the substrate at an angle of incidence that substantially prevents deposition of the seed material on the first and second sidewalls; forming a magnetic layer on the conductive layer; and forming an insulating-sealing layer on the magnetic layer.

Method for manufacturing a master pattern for a mold for a horology component, wherein the method includes manufacturing a first structure from a first photosensitive resin comprising at least one layer of photosensitive resin comprising a first pattern obtained by polymerizing the first photosensitive resin by irradiation through at least one mask, then developing the first photosensitive resin; and transforming the first structure into a second structure by structuring at least one surface of the first structure by the addition of a second photosensitive resin to the at least one surface.