G03H2001/046

DARK FIELD DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD

A dark field digital holographic microscope is disclosed which is configured to determine a characteristic of interest of a structure. The dark field digital holographic microscope comprises an illumination device configured to provide at least: a first beam pair comprising a first illumination beam of radiation (1010) and a first reference beam of radiation (1030) and a second beam pair comprising a second illumination beam of radiation (1020) and a second reference beam of radiation (1040); and one or more optical elements (1070) operable to capture a first scattered radiation and to capture a second scattered radiation scattered by the structure resultant from the first and second illumination beams respectively. The beams of the first beam pair are mutually coherent and the beams of the second beam pair are mutually coherent. The illumination device is configured to impose incoherence (ADI) between the first beam pair and second beam pair.

Optical measurement system for obtaining and analyzing surface topography of object

An optical measurement system comprises a polarization beam splitter for dividing an incident beam into a reference beam and a measurement beam, a first beam splitter for reflecting the measurement beam to form a first reflected measurement beam, a spatial light modulator for modulating the first reflected measurement beam to form a modulated measurement beam, a condenser lens for focusing the modulated measurement beam to an object to form a penetrating measurement beam, an objective lens for converting the penetrating measurement beam into a parallel measurement beam, a mirror for reflecting the parallel measurement beam to form an object beam, a second beam splitter for reflecting the reference beam to a path coincident with that of the object beam, and a camera for receiving an interference signal generated by the reference beam and the object beam to generate an image of the object.

Holographic imaging device and data processing method therefor
11644791 · 2023-05-09 · ·

A holographic imaging device and method realizes both a transmission type and a reflection type, and also realizes a long working distance wide field of view or ultra-high resolution. Object light emitted from an object, sequentially illuminated with parallel illumination light whose incident direction is changed, is recorded on a plurality of object light holograms for each incident direction using off-axis spherical wave reference light. The reference light is recorded on a reference light hologram using in-line spherical wave reference light being in-line with the object light. An object light wave hologram and its spatial frequency spectrum at the object position are generated for each incident direction using each hologram. A synthetic spectrum which occupies a wider frequency space is generated by matching each spectrum in the overlapping area, and a synthetic object light wave hologram with increased numerical aperture is obtained thereby.

SYSTEM FOR SPATIAL MULTIPLEXING
20220307815 · 2022-09-29 ·

Some embodiments are directed to a technique having an off-axis interferometric geometry that is capable of spatially multiplexing at least six complex wavefronts, while using the same number of camera pixels typically needed for a single off-axis hologram encoding a single complex wavefront. Each of the at least six parallel complex wavefronts is encoded into an off-axis hologram with a different fringe orientation, and all complex wavefronts can be fully reconstructed. This technique is especially useful for highly dynamic samples, as it allows the acquisition of at least six complex wavefronts simultaneously, optimizing the amount of information that can be acquired in a single camera exposure. The off-axis multiplexing holographic system of some embodiments provide an off-axis holography modality that is more camera spatial bandwidth efficient than on-axis holography. Moreover, the off-axis interferometric system allows simple simultaneous acquisition of at least six holographic channels, making it attractive for imaging dynamics.

Super-resolution holographic microscope

A super-resolution holographic microscope includes a light source configured to emit input light, a diffraction grating configured to split the input light into first diffracted light and second diffracted light, a mirror configured to reflect the first diffracted light, a wafer stage arranged on an optical path of the second diffracted light and on which a wafer is configured to be arranged, and a camera configured to receive the first diffracted light that is reflected by the mirror and the second diffracted light that is reflected by the wafer to generate a plurality of hologram images of the wafer.

DEVICE AND METHOD FOR ITERATIVE PHASE RECOVERY BASED ON PIXEL SUPER-RESOLVED ON-CHIP HOLOGRAPHY

A method for lens-free imaging of a sample or objects within the sample uses multi-height iterative phase retrieval and rotational field transformations to perform wide FOV imaging of pathology samples with clinically comparable image quality to a benchtop lens-based microscope. The solution of the transport-of-intensity (TIE) equation is used as an initial guess in the phase recovery process to speed the image recovery process. The holographically reconstructed image can be digitally focused at any depth within the object FOV (after image capture) without the need for any focus adjustment, and is also digitally corrected for artifacts arising from uncontrolled tilting and height variations between the sample and sensor planes. In an alternative embodiment, a synthetic aperture approach is used with multi-angle iterative phase retrieval to perform wide FOV imaging of pathology samples and increase the effective numerical aperture of the image.

System and a method for quantitative sample imaging using off-axis interferometry with extended field of view or faster frame rate

The present invention provides a sample inspection and quantitative imaging system and method for performing off-axis interferometric imaging while enabling to record off-axis holograms in an extended field of view (FOV) than possible using a given camera and imaging setup, and thus to enlarge (e.g. double, triple, or even more than this) the interferometric FOV, without changing the imaging parameters, such as the magnification and the resolution.

Method and system for pixel super-resolution of multiplexed holographic color images

A method of generating a color image of a sample includes obtaining a plurality of low resolution holographic images of the sample using a color image sensor, the sample illuminated simultaneously by light from three or more distinct colors, wherein the illuminated sample casts sample holograms on the image sensor and wherein the plurality of low resolution holographic images are obtained by relative x, y, and z directional shifts between sample holograms and the image sensor. Pixel super-resolved holograms of the sample are generated at each of the three or more distinct colors. De-multiplexed holograms are generated from the pixel super-resolved holograms. Phase information is retrieved from the de-multiplexed holograms using a phase retrieval algorithm to obtain complex holograms. The complex hologram for the three or more distinct colors is digitally combined and back-propagated to a sample plane to generate the color image.

Polarization holographic microscope system and sample image acquisition method using the same

A polarization holographic microscope system is disclosed. The polarization holographic microscope system can acquire a birefringence image and a three-dimensional phase image with high sensitivity by aperture synthesis of sample beams at various angles, and a sample image acquisition method using the microscope system.

Totagraphy: Coherent Diffractive/Digital Information Reconstruction by Iterative Phase Recovery Using Special Masks
20220187138 · 2022-06-16 ·

A totagram is produced by an iterative spectral phase recovery process resulting in complete information recovery using special masks, without a reference beam. Using these special masking systems reduce computation time, number of masks, and number of iterations. The special masking system is (1) a unity mask together with one or more bipolar binary masks with elements equal to 1 and −1, or (2) a unity mask together with one or more phase masks, or (3) a unity mask together with one pair of masks or more than one pair of masks having binary amplitudes of 0's and 1's, in which the masks in the pair are complementary to each other with respect to amplitude, or (4) one or more pairs of complementary masks with binary amplitudes of 0's and 1's without a unity mask.