A measuring apparatus comprises an industrial robot and a sensor fastened to a movable arm of the robot. A calibration body comprises a calibration element, a carrier, and an alignment element rigidly arranged relative to the carrier. The alignment element interacts with a counter piece provided on a carrying structure. Data specifying the pose of the calibration element relative to the alignment element are encoded in an encoding zone which may be embodied as a data matrix code. The calibration body is initially aligned on the carrying structure with the aid of the alignment element and the counter piece. The sensor then approaches the encoding zone to read the data encoded therein. Subsequently, the pose of the calibration element relative to the carrying structure is determined using the previously read data. Finally, the pose of the calibration element is measured by the sensor to calibrate the measuring apparatus.

Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.

A processing device includes: a first processing position (A1) and a second processing position (A2) at which rough processing is performed on a workpiece (W); a third processing position (B1) at which final finishing processing is performed on the workpiece (W) that was processed at the second processing position (A2); flexible vises (7) provided to the first processing position (A1) and the second processing position (A2), the flexible vises (7) securing the workpiece (W) by clamping the same; and a quick clamping device (20) provided to the third processing position (B1), the quick clamping device (20) securing the workpiece (W) by means of a pin. The processing device also includes a control unit that controls a rough processing tool for performing rough processing and a final finishing processing tool for performing final finishing processing.

A device for calibrating an irradiation system of an apparatus for producing a three-dimensional work piece includes a control unit to control the irradiation system so as to irradiate a radiation beam onto an irradiation plane according to a calibration pattern. The device also includes a sensor arrangement arranged in the irradiation plane to output signals to the control unit in response to being irradiated with the radiation beam according to the calibration pattern. The control unit generates a digital image of an actual irradiation pattern produced by the radiation beam incident on the sensor arrangement based on the signals output by the sensor arrangement, compares the digital image of the actual irradiation pattern with a digital image of a reference pattern so as to determine a deviation between the actual irradiation pattern and the reference pattern, and calibrates the irradiation system based on the determined deviation between the actual irradiation pattern and the reference pattern.

Provided is a marker position registration device that can prevent an axial direction in a coordinate system from being erroneously registered when a position in a marker is to be registered. The marker position registration device includes a display control unit that causes an input form to be displayed, the input form allowing coordinates in a robot coordinate system corresponding to a specific portion of an industrial robot when the specific portion indicates a specific position in a marker to be input in association with a position identifier for specifying the specific position which is assigned to the marker and a registration unit that registers the specific position in the robot coordinate system on the basis of a content input to the input form.

The present invention is provided with: a first processing position (A1) and a second processing position (A2) at which rough processing is performed on a workpiece (W); a third processing position (B1) at which final finishing processing is performed on the workpiece (W) that was processed at the second processing position (A2); flexible vices (7) provided to the first processing position (A1) and the second processing position (A2), the flexible vices (7) securing the workpiece (W) by clamping the same; and a quick clamping device (20) provided to the third processing position (B1), the quick clamping device (20) securing the workpiece (W) by means of a pin. The present invention is also provided with a control unit that controls a rough processing tool for performing rough processing and a final finishing processing tool for performing final finishing processing.

Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.

A measuring apparatus comprises an industrial robot and a sensor fastened to a movable arm of the robot. A calibration body comprises a calibration element, a carrier, and an alignment element rigidly arranged relative to the carrier. The alignment element interacts with a counter piece provided on a carrying structure. Data specifying the pose of the calibration element relative to the alignment element are encoded in an encoding zone which may be embodied as a data matrix code. The calibration body is initially aligned on the carrying structure with the aid of the alignment element and the counter piece. The sensor then approaches the encoding zone to read the data encoded therein. Subsequently, the pose of the calibration element relative to the carrying structure is determined using the previously read data. Finally, the pose of the calibration element is measured by the sensor to calibrate the measuring apparatus.

A device for calibrating an irradiation system of an apparatus for producing a three-dimensional work piece includes a control unit to control the irradiation system so as to irradiate a radiation beam onto an irradiation plane according to a calibration pattern. The device also includes a sensor arrangement arranged in the irradiation plane to output signals to the control unit in response to being irradiated with the radiation beam according to the calibration pattern. The control unit generates a digital image of an actual irradiation pattern produced by the radiation beam incident on the sensor arrangement based on the signals output by the sensor arrangement, compares the digital image of the actual irradiation pattern with a digital image of a reference pattern so as to determine a deviation between the actual irradiation pattern and the reference pattern, and calibrates the irradiation system based on the determined deviation between the actual irradiation pattern and the reference pattern.