A pressure balanced thermal actuator includes a flow housing having an inlet and an outlet, with the flow housing being affixed at opposing ends to two bellows housings, each of which contains a bellows. An actuation rod is operably coupled to each bellows and contains a fluid passage therewithin. When the temperature of the area surrounding the actuator increases, the pressure inside the bellows housings increases, and exerts a force on the bellows therein, compressing it. As a result, the actuation rod moves from a first position to a second position to align the fluid passage with the inlet and the outlet, enabling the controlled passage of a first fluid from the inlet, and through the fluid passage, to the outlet, to reduce the temperature of the area surrounding the valve assembly. The actuator is unaffected by changes in the ambient pressure, by working equally on two opposing bellows areas.

A cooling system includes a coolant source to cool down components of a processing chamber and a return line for the coolant coupled between the processing chamber and the coolant source. The return line has a valve, which includes a flow compartment having a first inlet and an outlet that support a default flow rate of the coolant, the flow compartment also having a second inlet. The valve has a plunger with a tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate. The valve has a shape memory alloy (SMA) spring positioned on the plunger between a side of the valve and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.

There are provided a throttle mechanism and the like that are capable of easily changing a cross-sectional area of a flow path according to an operating state. The throttle mechanism in an embodiment is a throttle mechanism that controls a flow rate of a fluid flowing through a flow path, and is configured to make a cross-sectional area of the flow path change autonomously according to temperature.

A valve includes a first inline compartment to attach to a first return line exiting a processing chamber and a second inline compartment to attach to a second return line entering a coolant source. A flow compartment is attached between the first inline compartment and the second inline compartment and through which a coolant is to return to the coolant source. A first inlet orifice and a second inlet orifice positioned between the first inline compartment and the flow compartment. A plunger has a tip to variably open and close the second inlet orifice. A shape memory alloy (SMA) spring is positioned on the plunger and attached to the tip, the SMA spring to variably increase or decrease a flow rate of the coolant through the second inlet orifice according to a temperature of the coolant.

A valve may include a housing forming one inlet and at least one outlet, an operating unit mounted in the housing, and performing expansion or contraction in accordance with a temperature of a flowing working fluid to selectively connect the at least outlet with the one inlet for exhausting the flowing working fluid outside of the housing, wherein the operating unit includes a sliding member slidably inserted into the interior of the housing, a flange member forming a penetration hole and fixedly mounted inside of the sliding member, a rod movably inserted into the penetration hole of the flange member, and a deformable member fixed at the penetration hole of the flange member and expanded or contracted in accordance with a temperature of the flowing working fluid.

A faucet includes a mixing chamber, a bypass chamber, a hot water actuator, a cold water actuator, and a valve assembly. The mixing chamber is in fluid communication with a spout. The bypass chamber is operably coupled to a source of cold water. The cold water actuator is operably coupled to provide, upon actuation, cold water to the mixing chamber. The hot water actuator is operably coupled to provide, upon actuation, hot water to the mixing chamber. The valve assembly has a seal configured to move in a direction away from the spout responsive to a temperature of water in the mixing chamber exceeding a threshold, such that fluid connection is provided between the bypass chamber and the mixing chamber.

A system, in certain embodiments, includes an SMA thermostat. The SMA thermostat includes a body, a sleeve, a biasing spring and an SMA spring. Upon actuation of the SMA spring at a phase transition temperature, the sleeve is configured to shift and expose flow ports formed in the body.

A fluid valve is provided including an inner shell and an outer shell. The inner shell includes a sidewall having a first opening and an interior surface defining an inner chamber. The outer shell includes a sidewall having a second opening and an exterior surface defining an outer chamber. The inner shell is positioned within the outer shell and the inner shell is movable relative to the outer chamber between a first position and a second position by a change in fluid conditions of a fluid supplied to the fluid valve. The first opening and the second opening overlap to define a passageway extending from the interior surface of the inner shell to the exterior surface of the outer shell. Relative movement of the inner shell from the first position toward the second position reduces a cross-sectional area of the passageway.

A method adjusts a regulated temperature in a faucet that includes a spout, a faucet body, a hot water valve and a cold water valve. The method includes regulating a maximum water temperature of water provided to the spout using a thermostatic valve cartridge to add cold water that bypasses the cold water valve to the water provided to the spout as a function of water temperature inside the thermostatic valve cartridge. The thermostatic valve cartridge is affixed to the faucet body and external access to the thermostatic valve cartridge is inhibited by at least one element. The method also includes removing the at least one element to expose at least a portion of a thermostatic valve cartridge, and rotating a rotatable portion of the thermostatic valve cartridge to adjust the regulated maximum water temperature.

There are provided a throttle mechanism and the like that are capable of easily changing a cross-sectional area of a flow path according to an operating state. The throttle mechanism in an embodiment is a throttle mechanism that controls a flow rate of a fluid flowing through a flow path, and is configured to make a cross-sectional area of the flow path change autonomously according to temperature.