A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.

A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.

There is provided a system and method for angstrom confinement of trapped ions. The method including: receiving water molecules and ionic compounds in a first reservoir, an angstrom confinement assembly is positioned between the first reservoir and a second reservoir, the angstrom confinement assembly defining angstrom conduits; and repeatedly applying an electric field across a first electrode and a second electrode, the first electrode on a same side of the angstrom confinement assembly as the first reservoir and the second electrode on a same side of the angstrom confinement assembly as the second reservoir, the electric field applied such that, when the electric field is applied, positive ions of the ionic compounds are induced to flow through the angstrom conduits, and wherein, when the electric field is not applied, water molecules flow into the angstrom conduits due to capillary forces to confine the positive ions in the angstrom conduits.

An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.

Metered dispensing of a microfluidic amount of fluid from a reservoir comprises a pressure device which applies a discharge pressure for fluid ejection via a discharge line through a valve arrangement. The valve device has a first valve with a minimum closing time and a second valve with a minimum opening time. A control device provides control signals for operation for metered dispensing of the amount of fluid as follows: a shortened minimum opening time for freeing the discharge line for the fluid flow, which time is shorter than the minimum opening time of the second valve; and a shortened minimum closing time for closing the discharge line for the fluid flow, which time is shorter than the minimum closing time of the first valve. Furthermore, a hand-held device for locally piercing human or animal skin is disclosed.

The present invention relates to a method for producing microcapsules having a calibrated diameter and at least one parameter characteristic of the mechanical properties of an equally calibrated microcapsule, characterized in that the method includes the steps of: producing microcapsules by means of injection into a microsystem (10) of three fluids (f1, f2, f3); deforming the microcapsules by means generating a flow within a capillary tube (20); observing and acquiring the outline of at least one deformed microcapsule observed by an optical acquisition means (30); comparing the acquired outline with outlines from a collection of reference microcapsule outlines; determining the diameter and said at least one parameter characteristic of the mechanical properties of the observed microcapsule; and modifying the flow rates (Q1, Q2, and/or Q3) of the fluids (f1, f2, f3). The present invention also relates to a system for producing calibrated microcapsules.

Various embodiments of the present disclosure provide an electronic inflator configured to direct pressurized air into an inflatable object, to monitor the air pressure inside the inflatable object, and to automatically stop directing pressurized air into the inflatable object after determining that the air pressure inside the inflatable object has reached a preset pressure.

Embodiments are related to systems and methods for fluidic assembly, and more particularly to systems and methods for increasing the efficiency of fluidic assembly.

A fluid system includes a fluid active region, a fluid channel, a convergence chamber and plural valves. The fluid active region includes at least one fluid-guiding unit. The fluid-guiding unit is enabled under control to transport fluid to be discharged out through the outlet aperture. The fluid channel is in communication with the outlet aperture of the fluid active region, and has plural branch channels to split the fluid discharged from the fluid active region. The convergence chamber is in communication with the fluid channel. The valves each of which is disposed in the corresponding branch channel, wherein the fluid is discharged out through the branch channels according to opened/closed states of the valves under control. The fluid system of the present disclosure is capable of acquiring required flow rate, pressure and amount of the fluid to be transported.