Disclosed herein is an x-ray interferometer for x-ray phase contrast imaging including an x-ray source, an x-ray source grating, two x-ray phase gratings, an x-ray analyzer grating and an x-ray detector. An alternative interferometer includes a periodically structured x-ray source, two x-ray phase gratings, an x-ray analyzer grating and an x-ray detector. The phase gratings are placed much closer to the x-ray detector than to the x-ray source and the image object is positioned upstream and close to the phase gratings to achieve high sensitivity and large field-of-view simultaneously.

An X-ray analyzer includes an X-ray source, a straight tube type multi-capillary, a flat plate spectroscopic crystal, a parallel/point focus type multi-capillary X-ray lens, and a Fresnel zone plate. A qualitative analysis is performed over an area on the sample, the flat plate spectroscopic crystal and the Fresnel zone plate are removed from the X-ray optical path, and X-rays are collected by the multi-capillary lens and the sample is irradiated. When analyzing the chemical morphology of an element, the multi-capillary lens retracts from the optical path, the source rotates, and the flat plate spectroscopic crystal and the Fresnel zone plate are inserted on the optical path. A narrow sample area is irradiated by the Fresnel zone plate with X-rays having energy extracted from the flat plate spectroscopic crystal. This makes it possible to carry out accurate qualitative analysis on the sample and perform detailed analysis of more minute parts.

Devices, systems and methods for performing X-ray scans with a single line of sight using a lens array for capturing the light field of the X-rays are described. In one example aspect, an X-ray optical system includes a primary optics subsection positioned to receive incoming X-rays after traversal through an object and to redirect the received incoming X-rays onto an intermediate image plane. The system also includes a microlens array positioned at or close to the intermediate image plane to receive at least some of the received incoming X-rays after redirection by the primary optics subsection to diffract the X-rays that are incident thereupon.

An apparatus for X-ray imaging is provided. An X-ray source provides an X-ray along an X-ray beam path. A holographic medium is along the X-ray beam path. An X-ray phase grating is between the X-ray source and the holographic medium along the X-ray beam path. A readout beam source provides a readout beam along a readout beam path. A readout detector is along the readout beam path, wherein the holographic medium is along the readout beam path.

Disclosed is a wavefront sensor for measuring a tilt of a wavefront at an array of locations across a beam of radiation, wherein said wavefront sensor comprises a film, for example of Zirconium, having an indent array comprising an indent at each of said array of locations, such that each indent of the indent array is operable to perform focusing of said radiation. Also disclosed is a radiation source and inspection apparatus comprising such a wavefront sensor.

A method of fabricating a refractive optical element on a substrate may provide less expensive and more compact optics for an X-ray system. The method includes coating the substrate with a resin and providing radiation to a portion of the resin to cause two photon polymerization of the resin. The method further includes forming, by two photon polymerization, a first surface of a polymer refractive optical element from the resin. The first surface is disposed along an optical axis of the refractive optical element and the first surface has a roughness of less than 100 nanometers. Further, the method includes forming, by two photon polymerization, a second surface of the polymer refractive optical element. The second surface is disposed along the optical axis of the refractive optical element and the second surface has a roughness of less than 100 nanometers.

A metal grid includes: a member which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the member, and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. A production method for a metal grid includes: a step of forming a valve metal film on a principal surface of a member, a step of forming an anodic oxide film by performing an anodic oxidation treatment on the valve metal film while the principal surface is curved; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

An apparatus for X-ray imaging is provided. An X-ray source provides an X-ray along an X-ray beam path. A holographic medium is along the X-ray beam path. An X-ray phase grating is between the X-ray source and the holographic medium along the X-ray beam path. A readout beam source provides a readout beam along a readout beam path. A readout detector is along the readout beam path, wherein the holographic medium is along the readout beam path.

The invention provides a charged particle irradiation apparatus including: a focusing magnet that deflects a charged particle beam to continuously change an irradiation angle of the beam to an isocenter; an irradiation nozzle that continuously moves along a shape on an exit side of an effective magnetic field region of the focusing magnet, wherein the beam exiting the focusing magnet is emitted to the isocenter through the irradiation nozzle; a power supply rail along the shape on the exit side of the region; and a collector shoe fixed to the irradiation nozzle and configured to slide along the rail to supply power from the rail to the irradiation nozzle. A surface of the collector shoe contacted with the rail has the same bend radius as or average bend radius of the rail, and/or the collector shoe slides along the rail in contact with a flat side surface of the rail.

The present invention is directed to a method for printing a micro-scaled or nano-scaled XUV and/or X-ray Diffractive optic (1), including the following steps: a) providing a material (2) with a first component (2a) being photo-sensitive and being polymerizable by two-photon-absorption, b) providing data (3) of a desired geometrical structure (4) of the optic (1) and creating at least one trajectory (8) corresponding to the data (3) of the desired structure (4) of the optic (1), c) providing a high-intensity energy beam (5), in particular a laser beam, wherein the beam (5) comprises a focus (F) having a position being adjustable to a plurality of positions (F1, F2, <, Fp) being coincident with the at least one trajectory (8), d) polymerization of the material (2) by two-photon-absorption at a first position (Fn) of the focus (F), thereby creating a first voxel (vn1n2n3) of the structure (4) of the optic (1), adjusting the position of the focus (F) from the first position (Fn) to a subsequent position (Fn+1) of the focus (F) along the at least one trajectory (8) and repeating step d) at the subsequent position (Fn+1) of the focus (F), wherein a distance (d) between each of the positions (F1, F2, <, Fp) of the focus (F) and at least one of the rest of the positions (F1, F2, <, Fp) of the focus (F) is smaller than a mean diameter (vd) of the voxels produced at these positions with respect to their dimension parallel to the distance (d).