Gas discharge tube having glass seal. In some embodiments, a gas discharge tube can include an insulator layer having first and second sides and defining an opening, and first and second electrodes that cover the opening on the first and second sides of the insulator layer, respectively. The gas discharge tube can further include a first glass layer implemented between the first electrode and the first side of the insulator layer, and a second glass layer implemented between the second electrode and the second side of the insulator layer, such that the first and second glass layers provide a seal for a chamber defined by the opening and the first and second electrodes.

Gas discharge tube having glass seal. In some embodiments, a gas discharge tube can include an insulator layer having first and second sides and defining an opening, and first and second electrodes that cover the opening on the first and second sides of the insulator layer, respectively. The gas discharge tube can further include a first glass layer implemented between the first electrode and the first side of the insulator layer, and a second glass layer implemented between the second electrode and the second side of the insulator layer, such that the first and second glass layers provide a seal for a chamber defined by the opening and the first and second electrodes.

According to one embodiment, a plasma source includes a container being configured to store a gas, a cathode member, and an anode member. The cathode member is provided in the container. The cathode member includes a plurality of first cathode layers. Each the cathode layers are arranged along a plurality of sides of a polygon. Each of the first cathode layers includes a first surface facing inside the polygon. The first surface is planar. The anode member is provided in the container.

An ionizing device is described, comprising a tubular bulb made of electrically insulating or dielectric material extending along a longitudinal reference axis and having the two longitudinal open ends and opposite each other, a tubular cathode engaged in the bulb, a tubular anode fitted to the bulb, a pair of covers, each of which has a respective internal seat into which a respective end of the bulb is inserted so as to hermetically seal it, and a conductive electrode which extends into the bulb and is electrically connected to the cathode.

An ionizing device is described, comprising a tubular bulb made of electrically insulating or dielectric material extending along a longitudinal reference axis and having the two longitudinal open ends and opposite each other, a tubular cathode engaged in the bulb, a tubular anode fitted to the bulb, a pair of covers, each of which has a respective internal seat into which a respective end of the bulb is inserted so as to hermetically seal it, and a conductive electrode which extends into the bulb and is electrically connected to the cathode.

An ionizing device is described, comprising a tubular bulb made of electrically insulating or dielectric material extending along a longitudinal reference axis and having the two longitudinal open ends and opposite each other, a tubular cathode engaged in the bulb, a tubular anode fitted to the bulb, a pair of covers, each of which has a respective internal seat into which a respective end of the bulb is inserted so as to hermetically seal it, and a conductive electrode which extends into the bulb and is electrically connected to the cathode.

An ionizing device is described, comprising a tubular bulb made of electrically insulating or dielectric material extending along a longitudinal reference axis and having the two longitudinal open ends and opposite each other, a tubular cathode engaged in the bulb, a tubular anode fitted to the bulb, a pair of covers, each of which has a respective internal seat into which a respective end of the bulb is inserted so as to hermetically seal it, and a conductive electrode which extends into the bulb and is electrically connected to the cathode.

Methods for fabricating gas discharge tubes. In some embodiments, a method for fabricating a gas discharge tube (GDT) device can include providing or forming an insulator substrate having first and second sides and defining an opening. The method can further include providing or forming a first electrode and a second electrode. The method can further include forming a first glass seal between the first electrode and the first side of the insulator substrate, and a second glass seal between the second electrode and the second side of the insulator substrate, such that the first and second glass seals provide a hermetic seal for a chamber defined by the opening and the first and second electrodes.

Methods for fabricating gas discharge tubes. In some embodiments, a method for fabricating a gas discharge tube (GDT) device can include providing or forming an insulator substrate having first and second sides and defining an opening. The method can further include providing or forming a first electrode and a second electrode. The method can further include forming a first glass seal between the first electrode and the first side of the insulator substrate, and a second glass seal between the second electrode and the second side of the insulator substrate, such that the first and second glass seals provide a hermetic seal for a chamber defined by the opening and the first and second electrodes.

Gas discharge tube having glass seal. In some embodiments, a gas discharge tube can include an insulator layer having first and second sides and defining an opening, and first and second electrodes that cover the opening on the first and second sides of the insulator layer, respectively. The gas discharge tube can further include a first glass layer implemented between the first electrode and the first side of the insulator layer, and a second glass layer implemented between the second electrode and the second side of the insulator layer, such that the first and second glass layers provide a seal for a chamber defined by the opening and the first and second electrodes.