A magnet system comprising: a supplied magnetic field producer configured for creating a supplied magnetic field (SMF) or a supplied radial electric field producer configured for creating a supplied radial electric field (SREF); and an electron gun positioned so as to fire electrons into the SMF or the SREF such that the electrons fired from the electron gun form an electron coil, wherein the electron coil creates a self-generated magnetic field (SGMF), wherein the electron coil is formed in a vacuum.

A magnet system comprising: a supplied magnetic field producer configured for creating a supplied magnetic field (SMF) or a supplied radial electric field producer configured for creating a supplied radial electric field (SREF); and an electron gun positioned so as to fire electrons into the SMF or the SREF such that the electrons fired from the electron gun form an electron coil, wherein the electron coil creates a self-generated magnetic field (SGMF), wherein the electron coil is formed in a vacuum.

A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

A magnet system comprising: a supplied magnetic field producer configured for creating a supplied magnetic field (SMF) or a supplied radial electric field producer configured for creating a supplied radial electric field (SREF); and an electron gun positioned so as to fire electrons into the SMF or the SREF such that the electrons fired from the electron gun form an electron coil, wherein the electron coil creates a self-generated magnetic field (SGMF), wherein the electron coil is formed in a vacuum.

A magnet system comprising: a supplied magnetic field producer configured for creating a supplied magnetic field (SMF) or a supplied radial electric field producer configured for creating a supplied radial electric field (SREF); and an electron gun positioned so as to fire electrons into the SMF or the SREF such that the electrons fired from the electron gun form an electron coil, wherein the electron coil creates a self-generated magnetic field (SGMF), wherein the electron coil is formed in a vacuum.

A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

Disclosed herein are magnet systems that may include a vacuum container for containing a vacuum; a supplied magnetic field (SMF) producer configured for creating a supplied magnetic field and a supplied alternating electric field (SAEF) producer configured for creating a supplied alternating electric field; and an electron source positioned so as to release electrons in the vacuum container into the SMF and the SAEF such that the electrons form an electron coil in the vacuum, wherein the electron coil creates a self-generated magnetic field (SGMF) that may be used as an electromagnet without wires.

Disclosed herein are magnet systems that may include a vacuum container for containing a vacuum; a supplied magnetic field (SMF) producer configured for creating a supplied magnetic field and a supplied alternating electric field (SAEF) producer configured for creating a supplied alternating electric field; and an electron source positioned so as to release electrons in the vacuum container into the SMF and the SAEF such that the electrons form an electron coil in the vacuum, wherein the electron coil creates a self-generated magnetic field (SGMF) that may be used as an electromagnet without wires.