An X-ray target assembly includes a cylindrical base and a cylindrical multilayered X-ray target that includes at least a heat transfer layer, an X-ray source layer and an adhesion layer provided between the heat transfer layer and the X-ray source layer , wherein the X-ray target is oriented such that the heat transfer layer is closest to the base, wherein the X-ray target is placed on top of a cylindrical carrying element, wherein the in-plane coefficient of thermal expansion of each of the heat transfer layer, the X-ray source layer, the adhesion layer and of the material of the carrying element is different, wherein the in-plane coefficient of thermal expansion of the heat transfer layer is the lowest and that of the material of the carrying element the highest.

The present disclosure relates to the production and use of a multi-layer X-ray source target. In certain implementations, layers of X-ray generating material may be interleaved with thermally conductive layers. To prevent delamination of the layers, various mechanical, chemical, and structural approaches are related, including approaches for reducing the internal stress associated with the deposited layers and for increasing binding strength between layers.

An X-ray tube with an anode assembly and specially designed heat transfer element is described. The anode assembly includes an X-ray producing target and a substantially cylindrical electrode that stops or inhibits electrons that may back-scatter from the target. At least one heat transfer element is positioned proximate the anode assembly and in the region between a conducting enclosure and a non-conducting hollow housing or tube. The heat transfer element is positioned to thermally couple the hot anode assembly to an air-cooled conducting enclosure while maintaining an electric isolation.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

Various systems and methods are provided for a biased cathode assembly of an X-ray tube with improved thermal management and a method of manufacturing same. In one example, a cathode assembly of an X-ray tube comprises an emitter assembly including an emitter coupled to an emitter support structure, and an electrode assembly including an electrode stack and a plurality of bias electrodes. The emitter assembly including a plurality of independent components that are coupled together. The electrode assembly including a plurality of independent components that are coupled together, and the emitter assembly being coupled to the electrode assembly.

The rotatable anode of a rotating anode X-ray source has demanding requirements placed upon it. For example, it may rotate at a frequency as high as 200 Hz. X-ray emission is stimulated by applying a large voltage to the cathode, causing electrons to collide with the focal track. The focal spot generated at the electron impact position may have a peak temperature between 2000° C. and 3000° C. The constant rotation of the rotating anode protects the focal track to some extent, however the average temperature of the focal track immediately following a CT acquisition protocol may still be around 1500° C. Therefore, demanding requirements are placed upon the design of the rotating anode. The present application proposes a multi-layer coating for the target region of a rotating X-ray anode which improves mechanical resilience and thermal resilience, whilst reducing the amount of expensive refractory metals required.

Various systems and methods are provided for a biased cathode assembly of an X-ray tube with improved thermal management and a method of manufacturing same. In one example, a cathode assembly of an X-ray tube comprises an emitter assembly including an emitter coupled to an emitter support structure, and an electrode assembly including an electrode stack and a plurality of bias electrodes. The emitter assembly including a plurality of independent components that are coupled together. The electrode assembly including a plurality of independent components that are coupled together, and the emitter assembly being coupled to the electrode assembly.

This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.

An X-ray module includes a housing in which an opening portion is formed; an electron gun that emits an electron beam; a target that transmits an X-ray generated when the electron beam is incident on the target and emits the X-ray from an X-ray-emitting surface; an X-ray-emitting window that seals the opening portion, and that transmits the X-ray and emits the X-ray to a first side in an axial direction; and a heat radiating unit disposed outside the housing. The housing includes a surface on which a protrusion protruding to the first side is formed, the opening portion is formed in the protrusion, and the target is disposed in the opening portion. The heat radiating unit includes a first portion extending along the surface and thermally connected to the surface, and a second portion extending from the first portion to a second side opposite the first side.

An X-ray module includes a housing; an electron gun that emits an electron beam inside the housing; a target disposed inside the housing and fixed to the housing, to generate an X-ray when the electron beam is incident on the target; and a deflection unit including a permanent magnet and disposed outside the housing, to deflect the electron beam by means of a magnetic force of the permanent magnet. The deflection unit includes a heat insulating member disposed at least between the permanent magnet and the housing. A thermal conductivity of the heat insulating member is lower than a thermal conductivity of the permanent magnet.