Provided are a scanning-type X-ray source and an imaging system therefor. The scanning-type X-ray source comprises a vacuum cavity (1), wherein a cathode (2) and a plurality of anode target structures (3) are arranged in the vacuum cavity (1); a gate electrode (4) is arranged in a position, close to the cathode (2), in the vacuum cavity (1); a focusing electrode (5) is arranged in a position, close to the gate electrode (4), in the vacuum cavity (1); and a deflection coil (6) is arranged in a position, close to the gate electrode (4), at the outer periphery of the vacuum cavity (1). The scanning-type X-ray source generates electron beams by using cathode (2), controls the powering-on/off of the electron beams by the gate electrode (4), and the deflection coil (6) controls the direction of motion of the electron beams, so as to complete the switching between multiple focuses.

A method for producing a radiation window includes patterning a photo resist structure onto a double-sided silicon wafer, plasma etching the silicon wafer to create an etched silicon wafer having a silicon supporting structure etched upon a first side of the double-sided silicon wafer, applying a silicon nitride thin film to the etched silicon wafer, patterning a photo resist structure and plasma etching a second side of the double-sided silicon wafer to create an initial window in the silicon nitride thin film, and wet etching the second side of the double-sided silicon wafer to release the silicon nitride thin film and supporting structure from the portion of the double-sided silicon wafer defined by the initial window.

X-ray transparent insulation can be sandwiched between an x-ray window and a ground plate. The x-ray transparent insulation can include aluminum nitride, boron nitride, or polyetherimide. The x-ray transparent insulation can include a curved side. The x-ray transparent insulation can be transparent to x-rays and resistant to x-ray damage, and can have high thermal conductivity. An x-ray window can have high thermal conductivity, high electrical conductivity, high melting point, low cost, and matched coefficient of thermal conductivity with the anode. The x-ray window can be made of tungsten. For consistent x-ray spot size and location, a focusing plate and a filament can be attached to a cathode with an open channel of the focusing plate aligned with a longitudinal dimension of the filament. Tabs of the focusing plate bordering the open channel can be bent to align with a location of the filament.

Some example embodiments provide an x-ray tube for a stereoscopic imaging having an evacuated x-ray tube housing; an electron emitter apparatus in the x-ray tube housing, the electron emitter apparatus including a first field effect emitter with a first emitter surface and a second field effect emitter with a second emitter surface, at least one of the first emitter surface or the second emitter surface being segmented such that a portion of the at least one of the first emitter surface or the second emitter surface can be set relative to the respective overall emitter surface by selectively switching emitter segments of the at least one of the first emitter surface or the second emitter surface; an anode unit in the x-ray tube housing, the anode unit configured to generate x-ray radiation for the stereoscopic imaging as a function of electrons striking two focal points; and a control unit.

An X-ray generation device includes: an electron gun that emits an electron beam; a target portion in which a plurality of elongated targets that generate an X-ray because of incidence of the electron beam are disposed parallel to each other; a housing that accommodates the electron gun and the target portion; and an X-ray emission window provided in the housing to emit the X-ray generated in the target portion, to an outside of the housing. The targets are disposed on the target portion to face the electron gun at a predetermined inclination angle with respect to an emission axis of the electron beam. The X-ray emission window is disposed at a position where the X-ray generated in a direction perpendicular to the target portion is transmittable through the X-ray emission window, to face the target portion at a predetermined inclination angle.

According to one embodiment, an X-ray tube device includes a cathode which emits an electron in a direction of an electron path, an anode target which faces the cathode and includes a target surface generating an X-ray, a vacuum envelope which accommodates the cathode and the anode target and is sealed in a vacuum-tight manner, and a quadrupole magnetic field generation unit which forms a magnetic field when direct current is supplied from an electric source, is eccentrically provided with respect to a straight line accordance with the electron path outside the vacuum envelope, and includes a quadrupole surrounding a circumference of a part of the electron path.

According to one embodiment, an X-ray tube device includes an anode target including a target surface and a cathode including a plurality of electron generation sources configured to emit the electrons, a vacuum envelope configured to house the cathode and the anode target and internally sealed in a vacuum airtight manner, and a quadrupole magnetic-field generator configured to form a magnetic field by being supplied with a current from a power source, the quadrupole magnetic-field generator being installed on an outer side of the vacuum envelope and constituted of a quadrupole surrounding a periphery of electron orbits of the electrons emitted simultaneously from each of the plurality of electron generation sources.

An X-ray beam is generated in an interaction zone of an electron beam and a target, the zone being an annular layer of a molten fusible metal in an annular channel of a rotating anode assembly. The channel has a surface profile which prevents slopping of the molten metal in the radial direction and in both directions along the rotation axis. The liquid-metal target forms a circular cylindrical surface due to the centrifugal force acting thereupon. The linear velocity of the target is preferably higher than 80 m/s; in a vacuum chamber, a changeable membrane made of carbon nanotubes is installed in the X-ray beam path and a protective screen with apertures for electron beam entry and X-ray beam exit is arranged around the interaction zone. The technical result consists in an X-ray source with increased power, brightness, lifetime and ease of use.

An X-ray imaging method including the following steps is provided. An X-ray source is provided, wherein the X-ray source includes a housing, a cathode, and an anode target. The housing has an end window. The cathode is disposed in the housing, and the anode target is disposed beside the end window. The cathode is caused to provide an electron beam. A portion of the electron beam hits at least a part of areas of the anode target to generate an X-ray and the X-ray is emitted out of the housing through the end window. The X-ray is caused to irradiate an object to generate X-ray image information. An image detector is used to receive the X-ray image information.

An X-ray module includes a housing in which an opening portion is formed; an electron gun that emits an electron beam; a target that transmits an X-ray generated when the electron beam is incident on the target and emits the X-ray from an X-ray-emitting surface; an X-ray-emitting window that seals the opening portion, and that transmits the X-ray and emits the X-ray to a first side in an axial direction; and a heat radiating unit disposed outside the housing. The housing includes a surface on which a protrusion protruding to the first side is formed, the opening portion is formed in the protrusion, and the target is disposed in the opening portion. The heat radiating unit includes a first portion extending along the surface and thermally connected to the surface, and a second portion extending from the first portion to a second side opposite the first side.