Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

A microwave source used in the radiotherapy device can be provided. The microwave source may include an anode block and one or more cathodes. The cathode of the microwave source may include a cathode support element having a plurality of slots. The plurality of slots can be axially around a circumference of the cathode support element. The microwave source may include a cathode heater including at least one filament. A first part of the at least one filament may be wound around the cathode support element along a first direction and received by a first portion of the plurality of slots, and a second part of the at least one filament may be wound around the cathode support element along a second direction and received by a second portion of the plurality of slots.

Provided is a low-cost magnetron that is excellent in productivity without any adverse effect on characteristics. Two large and small strap rings 11 (11A and 11B) are only disposed at lower ends, or input sides, of a plurality of vanes 10 (10A and 10B) in the direction of a tube axis m. Diameter Rip of a protruding flat surface 41 of an input side pole piece 18 is larger than diameter Rop of a protruding flat surface 40 of an output side pole piece 17. Therefore, it is possible to provide a practical magnetron without a significant decrease in productivity or characteristics from a conventional one, while cutting costs by reducing the number of parts with the use of two strap rings on one side.

Provided is a low-cost magnetron that is excellent in productivity without any adverse effect on characteristics. Two large and small strap rings 11 (11A and 11B) are only disposed at lower ends, or input sides, of a plurality of vanes 10 (10A and 10B) in the direction of a tube axis m. Diameter Rip of a protruding flat surface 41 of an input side pole piece 18 is larger than diameter Rop of a protruding flat surface 40 of an output side pole piece 17. Therefore, it is possible to provide a practical magnetron without a significant decrease in productivity or characteristics from a conventional one, while cutting costs by reducing the number of parts with the use of two strap rings on one side.

A magnetron is provided and includes a tube body with a plurality of communicated first cavities therein, a plurality of anodes in the first cavities including a cylinder and a plurality of vanes, outer ends of the vanes are connected with an inner circumferential surface of the cylinder; a first resonant cavity and a second resonant cavity are formed between the adjacent vanes, the cylinder is provided with a plurality of coupling slots arranged at intervals and running through the cylinder to communicate the first resonant cavity with the first cavity; a plurality of cathode arranged in and coaxially with the cylinder; the cathodes and inner ends of the vanes are spaced apart; at least part of the cathodes are located inside vanes, and an output slot is defined on the tube body for communicating the first cavity with an outside.

A magnetron is provided and includes a tube body with a plurality of communicated first cavities therein, a plurality of anodes in the first cavities including a cylinder and a plurality of vanes, outer ends of the vanes are connected with an inner circumferential surface of the cylinder; a first resonant cavity and a second resonant cavity are formed between the adjacent vanes, the cylinder is provided with a plurality of coupling slots arranged at intervals and running through the cylinder to communicate the first resonant cavity with the first cavity; a plurality of cathode arranged in and coaxially with the cylinder; the cathodes and inner ends of the vanes are spaced apart; at least part of the cathodes are located inside vanes, and an output slot is defined on the tube body for communicating the first cavity with an outside.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

A magnetron is provided and includes a tube body with a plurality of communicated first cavities therein, a plurality of anodes in the first cavities including a cylinder and a plurality of vanes, outer ends of the vanes are connected with an inner circumferential surface of the cylinder; a first resonant cavity and a second resonant cavity are formed between the adjacent vanes, the cylinder is provided with a plurality of coupling slots arranged at intervals and running through the cylinder to communicate the first resonant cavity with the first cavity; a plurality of cathode arranged in and coaxially with the cylinder; the cathodes and inner ends of the vanes are spaced apart; at least part of the cathodes are located inside vanes, and an output slot is defined on the tube body for communicating the first cavity with an outside.

A magnetron is provided and includes a tube body with a plurality of communicated first cavities therein, a plurality of anodes in the first cavities including a cylinder and a plurality of vanes, outer ends of the vanes are connected with an inner circumferential surface of the cylinder; a first resonant cavity and a second resonant cavity are formed between the adjacent vanes, the cylinder is provided with a plurality of coupling slots arranged at intervals and running through the cylinder to communicate the first resonant cavity with the first cavity; a plurality of cathode arranged in and coaxially with the cylinder; the cathodes and inner ends of the vanes are spaced apart; at least part of the cathodes are located inside vanes, and an output slot is defined on the tube body for communicating the first cavity with an outside.