Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.

Disclosed embodiments include a time-of-flight mass spectrometer with a straight ion optical axis comprising: an ion gate is electrically insolated electrode on which applied voltages to reject/pass ions through ion gate, entrance module and exit module set in focus/mirror modes, and create ion optical image on image plane located in field view aperture, electrostatic object lens, entrance module in focus mode and, transport electrostatic lens, exit module in focus mode and projection lens focused and map ions from image plane of field view aperture to image plane of ion detector, projection lens configured to form ion optical image of sample holder on image plane of ion detector and ion optical components with corrected geometrical, chromatic and timed aberrations configured to compensate time arriving disturbance in image plane of ion detector and improve mass and spatial resolution of image on image plane of ion detector.

Disclosed embodiments include a time-of-flight mass spectrometer with a straight ion optical axis comprising: an ion gate is electrically insolated electrode on which applied voltages to reject/pass ions through ion gate, entrance module and exit module set in focus/mirror modes, and create ion optical image on image plane located in field view aperture, electrostatic object lens, entrance module in focus mode and, transport electrostatic lens, exit module in focus mode and projection lens focused and map ions from image plane of field view aperture to image plane of ion detector, projection lens configured to form ion optical image of sample holder on image plane of ion detector and ion optical components with corrected geometrical, chromatic and timed aberrations configured to compensate time arriving disturbance in image plane of ion detector and improve mass and spatial resolution of image on image plane of ion detector.

Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.