H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32
Gas-filled discharge tubes
H01J37/32
Gas-filled discharge tubes
H01J37/32009
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32009
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32082
Radio frequency generated discharge
H01J37/32082
Radio frequency generated discharge
H01J37/32091
the radio frequency energy being capacitively coupled to the plasma
H01J37/32091
the radio frequency energy being capacitively coupled to the plasma