The present invention relates to a device for generating a dielectric barrier discharge for treatment of an object (1) to be activated with non-thermal atmospheric pressure plasma, comprising a dielectric working chamber (2) which has a wall (3) of a dielectric material and which encloses a working space (4), wherein a metallization (6) is applied to an outer side (5) of the wall (3) facing away from the working space (4), wherein the working space (4) is an open volume, and a high-voltage source (9) which is configured to apply a high voltage to the metallization (6) or to the object (1) to be activated when the object (1) to be activated is in the working space (4). According to a further aspect, the invention relates to a method of treatment of an object (1) to be activated with a non-thermal atmospheric pressure plasma.

A control circuit for generating a primary alternating current (AC) voltage signal provided to a dielectric barrier discharge (DBD) disk of a three-dimensional printer includes a switching regulator receiving a direct current (DC) voltage signal. The switching regulator modulates the DC voltage signal based on a variable duty cycle to create a modulated DC signal. The control circuit also includes a modulation circuit in electrical communication with the switching regulator. The modulation circuit introduces a frequency component to the modulated DC signal, where the primary AC voltage signal includes a variable duty cycle and a set frequency, and the frequency component introduced into the modulated DC signal is representative of the set frequency of the primary AC voltage.

There is provided a gas analyzer apparatus including: a sample chamber which is equipped with a dielectric wall structure and into which only sample gas to be measured is introduced; a plasma generation mechanism that generates plasma inside the sample chamber, which has been depressurized, using an electric field and/or a magnetic field applied through the dielectric wall structure; and an analyzer unit that analyzes the sample gas via the generated plasma. By doing so, it is possible to provide a gas analyzer apparatus capable of accurately analyzing sample gases, even those including corrosive gas, over a long period of time.

The present technology encompasses plasma sources including a first plate defining a first plurality of apertures arranged in a first set of rows. The first plate may include a first set of electrodes extending along a separate row of the first set of rows. The plasma sources may include a second plate defining a second plurality of apertures arranged in a second set of rows. The second plate may include a second set of electrodes extending along a separate row of the second set of rows. Each aperture of the second plurality of apertures may be axially aligned with an aperture of the first plurality of apertures. The plasma sources may include a third plate positioned between the first plate and the second plate. The third plate may define a third plurality of apertures.

A housing in an active gas generator according to the present disclosure includes a peripheral stepped region formed along an outer periphery of a central bottom region, the peripheral stepped region being higher in formed height than the central bottom region. A high-voltage-electrode dielectric film on the peripheral stepped region forms a gas separation structure for separating a gas stream into a feeding space and an active gas generating space including a discharge space. A vacuum pump disposed outside the housing sets the feeding space under vacuum.

A method of processing includes directing an electron beam comprising ballistic electrons from an electron source towards a peripheral region of a substrate to be processed. The peripheral region surrounds a central region of the substrate. The electron beam may be directed such that the ballistic electrons impinge on the peripheral region and not on the central region of the substrate. The ballistic electrons may stimulate chemical reactions on the substrate. The method may include placing the substrate on a substrate holder disposed within a vacuum chamber. The method may also include generating the electron beam from a plasma in the vacuum chamber. The method may further include processing the substrate with ions from the plasma.

A dielectric member that is attached to a lower surface of a stage is provided. The stage includes a base provided with a base channel through which a heat exchange medium passes. The dielectric member includes at least one first component including a passage that is connected to the base channel, and a second component surrounding the first component.

Provided in an active gas generation apparatus according to the present disclosure is a gas separation structure of separating a gas flow between an in-housing space and a discharge space by a cooling plate, an electrode holding member, and a high voltage apply electrode part. The active gas generation apparatus further includes an auxiliary metal electrode provided on an upper surface of an electrode dielectric film in the high voltage apply electrode part. The auxiliary metal electrode is provided to overlap with part of an active gas transmission path in a plan view, and set to ground potential.

Sterilisation apparatus comprising a sterilisation instrument configured to be inserted through the instrument channel of a surgical scoping device and a withdrawal device for withdrawing the sterilisation instrument from the instrument channel at a predetermined rate. The sterilisation instrument comprises an elongate probe having a probe tip with a first electrode and a second electrode arranged to produce an electric field from received RF and/or microwave frequency EM energy. In operation the instrument may disinfect an inner surface of the instrument channel by emitting energy whilst being withdrawn through the channel.

A system for generation of radicals in a liquid (e.g., OH and derivatively H.sub.2O.sub.2 in water) by a plasma reactor, including a first electrode having a rod shape or a tubular shape; a dielectric tubular housing coaxial with the first electrode and enclosing the first electrode, and having a gap to the first electrode of 0.3-30 mm; a second electrode on an outside of the dielectric tubular housing and coaxial with first electrode with a gap 0.3-30 mm; a high voltage power supply providing voltage oscillations or pulses of 0.5-30 kV and a frequency 1-50 kHz between the first and second electrodes; and a pump or a Venturi injector on an output of the plasma reactor and a chock valve on an input of reactor for generating a low water pressure in the gap between first and second electrodes so as to generate boiling in the gap.