A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.

The invention generally relates to systems and methods for conducting reactions and screening for reaction products.

The present disclosure provides a method for detecting short-chain fatty acids in biological samples, including a derivatizing step, a loading step and a detecting step. The derivatizing step includes treating the short-chain fatty acids in the biological sample with 2-nitrophenylhydrazine for derivatizing the short-chain fatty acids into a sample to be detected. The loading step includes loading the sample onto a paper carrier. The detecting step includes analyzing the sample loaded onto the paper carrier by direct analysis in real time mass spectrometry for obtaining a detection result. The method provided by the present disclosure may complete the analysis of the biological sample within a short period of time and achieve a quantitative result comparable to that obtained by conventional chromatographic approaches.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

Disclosed herein are specimen imaging systems, comprising: a sample stage in a vacuum environment, the sample stage configured to support a specimen; an electron beam generator configured to focus an electron beam on a first predetermined location on the specimen; a nanospray dispenser configured to dispense a nanospray onto a second predetermined location on the specimen; a mass spectrometer; and an extraction conduit configured to extract a plume of charged particles generated as a result of contact between the nanospray and the specimen and deliver the charged particles to the mass spectrometer. The system can create a topological and chemical map of the specimen by analyzing at least a portion of the specimen with a mass spectrometer to determine a chemical composition of the specimen at the second predetermined location and analyzing at least a portion of the specimen with the electron beam to determine a surface topology.

A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.

The invention generally relates to systems and methods for conducting reactions and screening for reaction products.

An efficient and stable secondary ion extraction apparatus for ion mass spectrometry has a sample target, a primary ion optical unit, a secondary ion extraction unit, an electronic gun, an ion lens and an ion deflection unit. The primary ion optical unit generates primary ions. The secondary ion extraction unit extracts secondary ions generated by the sample target. The electronic gun neutralizes charges accumulated on the surface of a sample. The ion lens focuses the secondary ions from the secondary ion extraction unit. The ion deflection unit carries out low-aberration deflection on the focused secondary ions. An extraction electrode consisting includes the surface of the sample target, a first extraction electrode and a second extraction electrode that extracts the secondary ions. When charges are accumulated on the surface of the sample target by the primary ions, the charges on the surface of the sample target are neutralized using the electronic gun.

The present disclosure provides a wafer sample analysis method and device. The method is applied to a secondary-ion-mass spectroscope (Sims) and includes: providing a wafer sample, the wafer sample at least including a slope configured to expose a substrate, a first protective layer and a first doped layer on a same surface, the first protective layer being formed on the substrate, and the first doped layer being formed on the first protective layer; and acquiring and analyzing a slope image of the slope to obtain a doping depth and a doping concentration of elements in the wafer sample in the slope image.

A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample. which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.