Patent classifications
H01J61/045
LOW-PRESSURE MERCURY VAPOUR DISCHARGE LAMP AND LAMP SYSTEM
The invention relates to a low-pressure mercury vapour discharge lamp comprising a discharge vessel which encloses a discharge chamber in a gas-tight manner with said discharge chamber being provided with a filling of mercury and a filler gas, in particular a noble gas, wherein the discharge vessel has a first end section and a second end section , a first electrode arranged on the first end section and a second electrode arranged on the second end section for maintaining a discharge along a discharge path between the first electrode and the second electrode , and an amalgam deposit for regulating the mercury vapour pressure in the discharge chamber is arranged on the first end section outside the discharge path , wherein the position of the amalgam deposit is secured by means of an adhesion agent .
Reflector for intense pulse light device
An intense pulse light (IPL) device includes a flash lamp and a light guide for guiding light from the flash lamp to an area to be treated. The flash lamp includes an anode electrode and a cathode electrode, and an envelope defining a cavity. A reflector reflects light from the flash lamp to the area to be treated. At least one electrode protector has a reflecting surface that redirects light from the electrodes toward a center of the reflector.
UV mercury low-pressure lamp with amalgam deposit
An ultraviolet mercury low-pressure amalgam lamp includes a tube having a first end and a second end, a first electrode placed in the first end of the tube, and a second electrode placed in the second end of the tube, whereby when the lamp is energized a discharge path is formed between the first and second electrodes. At least one amalgam deposit is adjacent to one of the first and second electrodes out of the discharge path between the first and second electrodes. The tube has at least one constriction, wherein the at least one amalgam deposit is placed behind the constriction with respect to the discharge path such that the at least one amalgam deposit is protected by the constriction from the heat emitted by the electrodes.
UV MERCURY LOW-PRESSURE LAMP WITH AMALGAM DEPOSIT
An ultraviolet mercury low-pressure amalgam lamp includes a tube having a first end and a second end, a first electrode placed in the first end of the tube, and a second electrode placed in the second end of the tube, whereby when the lamp is energized a discharge path is formed between the first and second electrodes. At least one amalgam deposit is adjacent to one of the first and second electrodes out of the discharge path between the first and second electrodes. The tube has at least one constriction, wherein the at least one amalgam deposit is placed behind the constriction with respect to the discharge path such that the at least one amalgam deposit is protected by the constriction from the heat emitted by the electrodes.
Radiation source, metrology apparatus, lithographic system and device manufacturing method
A radiation source apparatus comprising: a container comprising walls for defining a space for containing a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation; and a thermal load applicator adapted to apply a thermal load to at least part of the walls of the container to reduce stresses in the walls.