An ultraviolet emitting device according to the present disclosure includes a lamp for mounting a discharge gas and an ultraviolet emission source therein, and a plurality of yarns formed by extending and aggregating carbon nanotubes in a first direction, and includes a first electrode at least partially exposed to the discharge gas within the lamp. Accordingly, electron emission efficiency of the first electrode is improved to achieve high efficiency, and durability is also improved to provide a long-life device.

An ultraviolet emitting device according to the present disclosure includes a lamp for mounting a discharge gas and an ultraviolet emission source therein, and a plurality of yarns formed by extending and aggregating carbon nanotubes in a first direction, and includes a first electrode at least partially exposed to the discharge gas within the lamp. Accordingly, electron emission efficiency of the first electrode is improved to achieve high efficiency, and durability is also improved to provide a long-life device.

A light irradiation device according to an embodiment includes an excimer lamp including a light emitting tube emitting light, a first electrode disposed at an outer side of the light emitting tube, a second electrode disposed at an outer side of the light emitting tube in correspondence to the first electrode, and an auxiliary light emitting body disposed between the first electrode and the second electrode to emit light toward the light emitting tube when a voltage is applied to the first and second electrodes, and a case in which the excimer is provided and which has a contact point adjustment part configured to accommodate a portion of the auxiliary light emitting body.

A light irradiation device according to an embodiment includes an excimer lamp including a light emitting tube emitting light, a first electrode disposed at an outer side of the light emitting tube, a second electrode disposed at an outer side of the light emitting tube in correspondence to the first electrode, and an auxiliary light emitting body disposed between the first electrode and the second electrode to emit light toward the light emitting tube when a voltage is applied to the first and second electrodes, and a case in which the excimer is provided and which has a contact point adjustment part configured to accommodate a portion of the auxiliary light emitting body.

An excimer lamp according to an embodiment of the present disclosure is capable of improving start-up characteristics and a light irradiation efficiency of a lamp and being miniaturized. The excimer lamp includes a light emitting tube emitting light, a first electrode disposed at an outer side of the light emitting tube, a second electrode disposed at an outer side of the light emitting tube in correspondence to the first electrode, and an auxiliary light emitting body disposed between the first electrode and the second electrode to emit light toward the light emitting tube when a voltage is applied to the first and second electrodes, and a light irradiation device having the same.

An excimer lamp according to an embodiment of the present disclosure is capable of improving start-up characteristics and a light irradiation efficiency of a lamp and being miniaturized. The excimer lamp includes a light emitting tube emitting light, a first electrode disposed at an outer side of the light emitting tube, a second electrode disposed at an outer side of the light emitting tube in correspondence to the first electrode, and an auxiliary light emitting body disposed between the first electrode and the second electrode to emit light toward the light emitting tube when a voltage is applied to the first and second electrodes, and a light irradiation device having the same.

An excimer lamp includes a plurality of arc tubes and an electrode pair. The electrode pair comprises a plurality of elongated electrode plates extending along a tube axis direction of the plurality of arc tubes. Each electrode plate comprises a polarity opposite that of an adjacent electrode plate (i.e., alternating polarities). The plurality of arc tubes and the plurality of electrode plates are disposed in an alternating side-by-side orientation such that an arc tube of the plurality of arc tubes is disposed between adjacent electrode plates of the plurality of electrode plates.

An excimer lamp includes a plurality of arc tubes and an electrode pair. The electrode pair comprises a plurality of elongated electrode plates extending along a tube axis direction of the plurality of arc tubes. Each electrode plate comprises a polarity opposite that of an adjacent electrode plate (i.e., alternating polarities). The plurality of arc tubes and the plurality of electrode plates are disposed in an alternating side-by-side orientation such that an arc tube of the plurality of arc tubes is disposed between adjacent electrode plates of the plurality of electrode plates.

An extreme ultraviolet light source apparatus includes a disc-shaped cathode rotating about an axis, a disc-shaped anode rotating about an axis, an energy beam irradiation device irradiating a plasma raw material on the cathode with an energy beam to vaporize the plasma raw material, a power supply for causing a discharge between the cathode and the anode for generating a plasma in the gap between the cathode and the anode to emit extreme ultraviolet light, and an irradiation position adjusting mechanism for adjusting a position at which the cathode is irradiated with the energy beam. The cathode, the anode, and the irradiation position adjusting mechanism are accommodated in a housing. A photography device is disposed outside the housing and is configured to photograph a visible-light image of a vicinity of the cathode and the anode, the vicinity including visible light emitted from the plasma.

An extreme ultraviolet light source apparatus includes a disc-shaped cathode rotating about an axis, a disc-shaped anode rotating about an axis, an energy beam irradiation device irradiating a plasma raw material on the cathode with an energy beam to vaporize the plasma raw material, a power supply for causing a discharge between the cathode and the anode for generating a plasma in the gap between the cathode and the anode to emit extreme ultraviolet light, and an irradiation position adjusting mechanism for adjusting a position at which the cathode is irradiated with the energy beam. The cathode, the anode, and the irradiation position adjusting mechanism are accommodated in a housing. A photography device is disposed outside the housing and is configured to photograph a visible-light image of a vicinity of the cathode and the anode, the vicinity including visible light emitted from the plasma.