In a light source device, a control unit causes an energy density of a laser light in a lighting start region RS when a laser support light is maintained to be lower than an energy density of the laser light in the lighting start region RS when the laser support light is put on. For this reason, when the laser support light is maintained, a laser light L is radiated to the lighting start region RS at an energy density of a degree where sputtering does not occur. Therefore, in the light source device, because sputtering in a light emission sealing body can be suppressed, a sufficiently long life can be realized.

A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizontal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.

A method and apparatus for a sealed high intensity illumination device are disclosed. The device is configured to receive a laser beam from a laser light source. The device has a sealed chamber configured to contain an ionizable medium. The chamber has a substantially flat ingress window disposed within a wall of the integral reflective chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, a plasma ignition region, and a high intensity light egress window configured to emit high intensity light from the chamber. The chamber has an integral reflective chamber interior surface configured to reflect high intensity light from the plasma sustaining region to the egress window. There is a direct path of the laser beam from the laser light source through the lens and ingress window to the lens focal region.

A discharge lamp lighting device includes a control unit adapted to control a frequency of the AC electric current supplied to a discharge lamp by a feeding unit, in different manners within a first term and a second term which are alternately repeated, the control unit is adapted to control the frequency of the AC electric current such that, within the first term, the frequency of the AC electric current becomes at least one frequency out of plural set frequencies, and is further adapted to control the frequency of the AC electric current, based on a predetermined frequency and an electric current within the previous first term, such that, within the second term, the frequency of the AC electric current becomes a frequency lower than this predetermined frequency.

At least one of the electrodes of a discharge lamp, including at an interior of a main body of the electrode: a heat-transmitting substance of the melting point lower than that of a material which makes up the main body; and a regulating body that is made up of a material of the melting point higher than that of the heat-transmitting substance, that includes a blade which extends in the axial direction and in a radial direction perpendicular to the axial direction, and that regulates convection of the heat-transmitting substance. Surface roughness Rz of at least one of a region which is on an inner wall face of the main body and with which the regulating body makes contact and a region which is on a surface of the regulating body and with which the inner wall face makes contact is not greater than 1.52 μm.

The subject of the invention is a method and device for reducing contamination in a plasma reactor, especially contamination by lubricants, particularly for plasma processing of materials. The method is based on the fact that the contaminated gas pumped out of at least one reduced pressure vacuum chamber in the form of a plasma lamp (LA.sub.1, LA.sub.2, LA.sub.3) is purified in at least one purifying plasma lamp (LA.sub.01, LA.sub.02, LA.sub.H, LA.sub.E), in which a glow discharge is initiated between the anodes of the purifying plasma lamp (A01, A02) and the cathodes of the purifying plasma lamp (K.sub.01, K.sub.02), favorably particles of lubricants are cracked and partially polymerized, while processed heavy particles of lubricants are collected in a buffer tank (ZB) and then discharged outside the pumping system. The device contains at least one reduced pressure vacuum chamber in the form of a plasma lamp (LA.sub.1, LA.sub.2, LA.sub.3), it is connected to at least one purifying plasma lamp (LA.sub.01, LA.sub.02, LA.sub.H, LA.sub.E) with a buffer tank (ZB) connected to a vacuum pump (PP). The vacuum tube connecting the plasma lamps (LA.sub.1, LA.sub.2, LA.sub.3) with the purifying plasma lamp (LA.sub.01, LA.sub.02, LA.sub.H, LA.sub.E)) is equipped with a dosing valve (V) for the gaseous admixture medium (MD) to plasma lamps (LA.sub.1, LA.sub.2, LA.sub.3), from which radiation (R.sub.1, R.sub.2, R.sub.3) is directed to the processed material (OM).