The disclosed subject matter includes devices and methods relating to vacuums and vacuum assemblies. In some aspects, methods and devices relate to a vacuum assembly including a body defining an evacuated vacuum chamber, a conduit in the body extending between the vacuum chamber and an exterior of the body, a plug at least partially occluding the conduit, and a seal between the plug and the body that seals the vacuum chamber from the exterior of the body.

A getter assembly for a vacuumed compartment having a plate. A primary getter material is deposited on the plate. A cover layer is deposited over the primary getter material on the plate.

A getter assembly for a vacuumed compartment having a plate. A primary getter material is deposited on the plate. A cover layer is deposited over the primary getter material on the plate.

A vacuum insulated compartment includes an outer wrapper and an inner liner that is sealed to the outer wrapper. A cavity is defined therebetween. The cavity includes a negative pressure. An insulation material is disposed in the cavity. A getter assembly is disposed in the cavity and includes a primary getter material that is deposited on a plate. A cover layer is deposited over the primary getter material on the plate. A vessel is nested within the primary getter material. A secondary getter material is disposed within the vessel. A protective enclosure is disposed around the getter assembly.

A vacuum insulated compartment includes an outer wrapper and an inner liner that is sealed to the outer wrapper. A cavity is defined therebetween. The cavity includes a negative pressure. An insulation material is disposed in the cavity. A getter assembly is disposed in the cavity and includes a primary getter material that is deposited on a plate. A cover layer is deposited over the primary getter material on the plate. A vessel is nested within the primary getter material. A secondary getter material is disposed within the vessel. A protective enclosure is disposed around the getter assembly.

A vacuum insulated compartment includes an outer wrapper and an inner liner that is sealed to the outer wrapper. A cavity is defined therebetween. The cavity includes a negative pressure. An insulation material is disposed in the cavity. A getter assembly is disposed in the cavity and includes a primary getter material that is deposited on a plate. A cover layer is deposited over the primary getter material on the plate. A vessel is nested within the primary getter material. A secondary getter material is disposed within the vessel. A protective enclosure is disposed around the getter assembly.

A vacuum insulated compartment includes an outer wrapper and an inner liner that is sealed to the outer wrapper. A cavity is defined therebetween. The cavity includes a negative pressure. An insulation material is disposed in the cavity. A getter assembly is disposed in the cavity and includes a primary getter material that is deposited on a plate. A cover layer is deposited over the primary getter material on the plate. A vessel is nested within the primary getter material. A secondary getter material is disposed within the vessel. A protective enclosure is disposed around the getter assembly.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.