A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

An ion source includes an external housing, an electrically conductive tip, a gas supply system, configured to supply an operating gas into the neighborhood of the tip, and a cooling system configured to cool the tip. The gas supply system includes a first tube with a hollow interior, and a chemical getter material is provided in the hollow interior of the tube.

A getter assembly for a vacuumed compartment having a plate. A primary getter material is deposited on the plate. A cover layer is deposited over the primary getter material on the plate.

A vacuum insulated compartment includes an outer wrapper and an inner liner that is sealed to the outer wrapper. A cavity is defined therebetween. The cavity includes a negative pressure. An insulation material is disposed in the cavity. A getter assembly is disposed in the cavity and includes a primary getter material that is deposited on a plate. A cover layer is deposited over the primary getter material on the plate. A vessel is nested within the primary getter material. A secondary getter material is disposed within the vessel. A protective enclosure is disposed around the getter assembly.

A vacuum insulated compartment includes an outer wrapper and an inner liner that is sealed to the outer wrapper. A cavity is defined therebetween. The cavity includes a negative pressure. An insulation material is disposed in the cavity. A getter assembly is disposed in the cavity and includes a primary getter material that is deposited on a plate. A cover layer is deposited over the primary getter material on the plate. A vessel is nested within the primary getter material. A secondary getter material is disposed within the vessel. A protective enclosure is disposed around the getter assembly.

A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.

A gas discharge lamp and photoionization sensor employing the gas discharge lamp. The lamp includes a housing containing a working gas sealed within the housing and a primary ultra-violet transparent window through a first longitudinal end of the housing. In a first embodiment the lamp includes an arched band of elastic getter material band with longitudinally extending diametrically opposed legs wedged within the chamber defined by the housing. In a second embodiment the lamp includes a second ultra-violet transparent window within the housing held into positon against the primary ultra-violet transparent window by an arched metal support band within the housing.

A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.

A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.

The present disclosure generally relates to field emission cathode structure for a field emission arrangement, specifically adapted for enhance reliability and prolong the lifetime of the field emission arrangement by arranging a getter element underneath a gas permeable portion of the field emission cathode structure. The present disclosure also relates to a field emission lighting arrangement comprising such a field emission cathode structure and to a field emission lighting system.