IPIQ

ELECTRICITY

H01

ELECTRIC ELEMENTS

H01L

SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

21/00

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02

Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/027

Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

H01L21/033

comprising inorganic layers

H01L21/0334

characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane

H01L21/0338

Process specially adapted to improve the resolution of the mask