H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/04
the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer