H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; ; Apparatus not specifically provided for elsewhere
H01L21/67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; ; Apparatus not specifically provided for elsewhere
H01L21/67005
Apparatus not specifically provided for elsewhere
H01L21/67005
Apparatus not specifically provided for elsewhere
H01L21/67011
Apparatus for manufacture or treatment
H01L21/67011
Apparatus for manufacture or treatment
H01L21/67017
Apparatus for fluid treatment
H01L21/67017
Apparatus for fluid treatment
H01L21/67028
for cleaning followed by drying, rinsing, stripping, blasting or the like
H01L21/67028
for cleaning followed by drying, rinsing, stripping, blasting or the like
H01L21/6704
for wet cleaning or washing
H01L21/6704
for wet cleaning or washing
H01L21/67051
using mainly spraying means, e.g. nozzles
H01L21/67051
using mainly spraying means, e.g. nozzles