H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/67 Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; ; Apparatus not specifically provided for elsewhere
H01L21/67005 Apparatus not specifically provided for elsewhere
H01L21/67011 Apparatus for manufacture or treatment
H01L21/67144 Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates