A transporting system includes a first rail including a first region and a second region, the first region being a region where the first rail extends linearly and the second region being a region where the first rail is curved. A second rail includes a third region, separated from the first region, and a fourth region overlapping the second region, wherein the first and second rails merge at a joining location that includes the second region and the fourth region. Optical lines are disposed in the second region and the fourth region, wherein the optical lines are parallel to each other in the fourth region. A first transporting unit travels on the first rail. A second transporting unit travels on the second rail. A first controller controls the traveling of the first and second transporting units using light transmitted or received through the optical lines.

A dynamic routing method and apparatus for an Overhead Hoist Transport (OHT) system are disclosed. The present disclosure in some embodiments provides a dynamic routing method for an OHT system, including generating a Q table of records of at least one Q value which is a time for a vehicle to move through an edge between two adjacent nodes to a node other than the two adjacent nodes, measuring a transit time of the vehicle when assigned a destination node and passing a transit edge between a current node and next node, extracting target edges to be updated according to the transit time from a plurality of edges, and differentially updating Q values for the target edges according to distances to the transit edge partially based on the transit time, the Q values for the target edges being time values for the vehicle to move through the target edges to the destination node.

A linearly moving mechanism includes an internal moving body provided within a case body and configured to be moved in a linear direction, the internal moving body being configured to move an external moving body connected to a connection member protruded from the case body through an opening formed at the case body; a seal belt extending in the linear direction and provided within the case body to close the opening, a first surface side of both end portions of the seal belt in a widthwise direction thereof facing an edge portion of the opening while being spaced apart therefrom; and a deformation suppressing member provided to face a second surface side of the both end portions to suppress deformation of the seal belt, the seal belt being connected to the internal moving body to be moved along with a movement of the internal moving body.

An embodiment of the present disclosure aims to provide a logistics system capable of preventing congestion of transport vehicles in a specific section of a fabrication facility. According to the present disclosure, a logistics system in a fabrication facility includes a stocker equipment that is located near a central passage and stores an article, and a rail that provides a travel path of a transport vehicle that loads and unloads the article to the stocker equipment. The stocker equipment includes a load port disposed on a side opposite to the central passage and a rack that provides a space for storing the article. The rail includes a central rail formed along the central passage and a branch rail that is branched from the central passage and formed along the periphery of the load port.

A processing system is provided, including a vacuum enclosure having a plurality of process windows and a continuous track positioned therein; a plurality of processing chambers attached sidewalls of the vacuum enclosures, each processing chamber about one of the process windows; a loadlock attached at one end of the vacuum enclosure and having a loading track positioned therein; at least one gate valve separating the loadlock from the vacuum enclosure; a plurality of substrate carriers configured to travel on the continuous track and the loading track; at least one track exchanger positioned within the vacuum enclosure, the track exchangers movable between a first position, wherein substrate carriers are made to continuously move on the continuous track, and a second position wherein the substrate carriers are made to transfer between the continuous track and the loading track.

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

The present invention provides a transferring unit traveling on a rail provided along a ceiling, the transferring unit including: a body provided with a traveling driver; traveling wheel rotated by receiving power from the traveling driver; a grip member configured to grip an article; a lifting member provided between the body and the grip member and configured to move the grip member in a vertical direction; and a controller, in which the controller lowers or raises the grip member while the transferring unit travels on the rail, in which the controller controls the lifting member and the traveling driver so that the lowering or raising of the grip member is performed in a constant speed section in which the transferring unit travels at a constant speed.

A system is disclosed for transferring a substance pattern to a substrate. The system comprises a nip defined between a roller and an opposing surface, a web carrying the substance pattern driven to pass the nip with a predetermined velocity, and an endless conveyor for transporting the substrate towards the nip, the substrate passing through the nip at the same time, and with the same speed, as the web in order for the substance pattern to be transferred from the web to the substrate. Upon gripping of the substrate by the nip, no further force is applied by the transport conveyor, thereby avoiding compression of the substrate. The endless transport conveyor can be formed with at least one projection configured to engage a trailing edge of the substrate and can be driven to push the substrate towards the nip with a velocity less than the velocity of the web.

An overhead transport vehicle system stores a large number of articles and includes an inclined rail and overhead transport vehicles each including a traveler to travel on the inclined rail, a holder to hold an article, an elevator to raise and lower the holder, a horizontality guide to keep the elevator horizontal or substantially horizontal at the inclined rail, and a controller. Supports are horizontally provided at a same or substantially same height, and the overhead transport vehicles located on the inclined rail are able to transfer the article between them. The overhead transport vehicles transfer the article between the supports and the controller controls the elevator to raise and lower the holder by a raising and lowering amount according to a height distance between the inclined rail and an individual support.

A traveling vehicle controller includes a command assignment controller to detect a first-to-arrive traveling vehicle that is able to reach a destination point first among traveling vehicles, based on travel route candidates on which the traveling vehicles travel along a travel path from respective positions to reach the destination point, and assign the command to the first-to-arrive traveling vehicle. During detection of the first-to-arrive traveling vehicle, when a traveling vehicle traveling toward a branch point on the travel path is located within a range of a branch-switching impossible distance from the branch point and is scheduled to proceed toward a main way at the branch point, the command assignment controller performs pseudo-shift processing by which this traveling vehicle is determined to be located in a position downstream of the branch point and on a side of the main way.